FIB-DIC ring-core measurement of the residual stress on HiPIMS W/Cu and Cr/Cu multilayer thin films

Zhen Yi Zeng, Tra Anh Khoa Nguyen, Nhat Minh Dang, Xiu Wei Wu, Terry Yuan Feng Chen, Ming Tzer Lin

研究成果: Article同行評審

1 引文 斯高帕斯(Scopus)

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Engineering & Materials Science

Physics & Astronomy

Chemical Compounds