Formaldehyde sensing characteristics of an aluminum-doped zinc oxide (AZO) thin-film-based sensor

Cheng Yu Chi, Huey Ing Chen, Wei Cheng Chen, Ching Hong Chang, Wen Chau Liu

研究成果: Article

11 引文 (Scopus)

摘要

An aluminum-doped zinc oxide (AZO) thin-film-based formaldehyde sensor prepared using radio-frequency sputtering (RF) is studied. The proposed device has a very high formaldehyde sensing response of 95.5 (@20 ppm HCHO/air, 350 °C), an extremely low detection limit (≤40 ppb HCHO/air), a relatively low operating temperature (≤350 °C), and a wide sensing range. Moreover, the device has a simple structure and is easily fabricated, low cost, and environmentally friendly. Therefore, the proposed AZO thin-film-based sensor is promising for high-performance formaldehyde sensing applications.

原文English
頁(從 - 到)3017-3024
頁數8
期刊Sensors and Actuators, B: Chemical
255
DOIs
出版狀態Published - 2018 二月

指紋

Zinc Oxide
Zinc oxide
formaldehyde
Aluminum
Formaldehyde
zinc oxides
Oxide films
aluminum
Thin films
sensors
Sensors
thin films
Air
Sputtering
air
operating temperature
radio frequencies
sputtering
Costs
Temperature

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Electrical and Electronic Engineering
  • Materials Chemistry

引用此文

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abstract = "An aluminum-doped zinc oxide (AZO) thin-film-based formaldehyde sensor prepared using radio-frequency sputtering (RF) is studied. The proposed device has a very high formaldehyde sensing response of 95.5 (@20 ppm HCHO/air, 350 °C), an extremely low detection limit (≤40 ppb HCHO/air), a relatively low operating temperature (≤350 °C), and a wide sensing range. Moreover, the device has a simple structure and is easily fabricated, low cost, and environmentally friendly. Therefore, the proposed AZO thin-film-based sensor is promising for high-performance formaldehyde sensing applications.",
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Formaldehyde sensing characteristics of an aluminum-doped zinc oxide (AZO) thin-film-based sensor. / Chi, Cheng Yu; Chen, Huey Ing; Chen, Wei Cheng; Chang, Ching Hong; Liu, Wen Chau.

於: Sensors and Actuators, B: Chemical, 卷 255, 02.2018, p. 3017-3024.

研究成果: Article

TY - JOUR

T1 - Formaldehyde sensing characteristics of an aluminum-doped zinc oxide (AZO) thin-film-based sensor

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AU - Chen, Wei Cheng

AU - Chang, Ching Hong

AU - Liu, Wen Chau

PY - 2018/2

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