TY - JOUR
T1 - Formaldehyde sensing characteristics of an aluminum-doped zinc oxide (AZO) thin-film-based sensor
AU - Chi, Cheng Yu
AU - Chen, Huey Ing
AU - Chen, Wei Cheng
AU - Chang, Ching Hong
AU - Liu, Wen Chau
N1 - Funding Information:
Part of this work was supported by the Ministry of Science and Technology of the Republic of China under grant NSC-100-2221-E-006-244-MY3 and the Advanced Optoelectronic Technology Center , National Cheng Kung University. Cheng-Yu Chi is currently pursuing the M.S. degree with the Institute of Microelectronics and Department of Electrical Engineering, National Cheng-Kung University, Tainan, Taiwan. His research has focused on semiconductor gas sensors. Huey-Ing Chen received the B.S., M.S., and Ph.D. degrees from Cheng Kung University (NCKU), Tainan, Taiwan, in 1979, 1981, and 1994, respectively, all in chemical engineering. She joined the faculty at NCKU as an Instructor, an Associate Professor, and a Professor in the Department of Chemical Engineering in 1981, 1994, and 2003, respectively. She is currently a professor in the same department. Her research presently focuses on chemical sensors, nanomaterials, gas membrane separation and, adsorption and catalysis. Wei-Cheng Chen is currently pursuing the Ph.D. degree with the Institute of Microelectronics and Department of Electrical Engineering, National Cheng-Kung University, Tainan, Taiwan. His research has focused on the III–V compound light-emitting diodes. Ching-Hong Chang is currently working toward the Ph.D. degree in the Institute of Microelectronics and the Department of Electrical Engineering, NCKU, Tainan, Taiwan. His research has focused on the III–V heterostructure field-effecttransistors and field of semiconductor gas sensors. Wen-Chau Liu received the B.S., M.S., and Ph.D. degrees in electrical engineering from the National Cheng-Kung University (NCKU), Tainan, Taiwan, in 1979, 1981, and 1986, respectively. He was with the faculty at National Cheng-Kung University, as an Instructor and an Associate Professor with the Department of Electrical Engineering in 1983, 1986, and 1992, respectively. Since 2002, he has been a Distinguished Professor in the same department. He has published more than 300 journal papers. He is the holder of 54 patents in the semiconductor field.
PY - 2018/2
Y1 - 2018/2
N2 - An aluminum-doped zinc oxide (AZO) thin-film-based formaldehyde sensor prepared using radio-frequency sputtering (RF) is studied. The proposed device has a very high formaldehyde sensing response of 95.5 (@20 ppm HCHO/air, 350 °C), an extremely low detection limit (≤40 ppb HCHO/air), a relatively low operating temperature (≤350 °C), and a wide sensing range. Moreover, the device has a simple structure and is easily fabricated, low cost, and environmentally friendly. Therefore, the proposed AZO thin-film-based sensor is promising for high-performance formaldehyde sensing applications.
AB - An aluminum-doped zinc oxide (AZO) thin-film-based formaldehyde sensor prepared using radio-frequency sputtering (RF) is studied. The proposed device has a very high formaldehyde sensing response of 95.5 (@20 ppm HCHO/air, 350 °C), an extremely low detection limit (≤40 ppb HCHO/air), a relatively low operating temperature (≤350 °C), and a wide sensing range. Moreover, the device has a simple structure and is easily fabricated, low cost, and environmentally friendly. Therefore, the proposed AZO thin-film-based sensor is promising for high-performance formaldehyde sensing applications.
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U2 - 10.1016/j.snb.2017.09.125
DO - 10.1016/j.snb.2017.09.125
M3 - Article
AN - SCOPUS:85030623822
VL - 255
SP - 3017
EP - 3024
JO - Sensors and Actuators, B: Chemical
JF - Sensors and Actuators, B: Chemical
SN - 0925-4005
ER -