摘要
An aluminum-doped zinc oxide (AZO) thin-film-based formaldehyde sensor prepared using radio-frequency sputtering (RF) is studied. The proposed device has a very high formaldehyde sensing response of 95.5 (@20 ppm HCHO/air, 350 °C), an extremely low detection limit (≤40 ppb HCHO/air), a relatively low operating temperature (≤350 °C), and a wide sensing range. Moreover, the device has a simple structure and is easily fabricated, low cost, and environmentally friendly. Therefore, the proposed AZO thin-film-based sensor is promising for high-performance formaldehyde sensing applications.
| 原文 | English |
|---|---|
| 頁（從 - 到） | 3017-3024 |
| 頁數 | 8 |
| 期刊 | Sensors and Actuators, B: Chemical |
| 卷 | 255 |
| DOIs | |
| 出版狀態 | Published - 2018 二月 |
指紋
All Science Journal Classification (ASJC) codes
- Electronic, Optical and Magnetic Materials
- Instrumentation
- Condensed Matter Physics
- Surfaces, Coatings and Films
- Metals and Alloys
- Electrical and Electronic Engineering
- Materials Chemistry
引用此文
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Formaldehyde sensing characteristics of an aluminum-doped zinc oxide (AZO) thin-film-based sensor. / Chi, Cheng Yu; Chen, Huey Ing; Chen, Wei Cheng; Chang, Ching Hong; Liu, Wen Chau.
於: Sensors and Actuators, B: Chemical, 卷 255, 02.2018, p. 3017-3024.研究成果: Article
TY - JOUR
T1 - Formaldehyde sensing characteristics of an aluminum-doped zinc oxide (AZO) thin-film-based sensor
AU - Chi, Cheng Yu
AU - Chen, Huey Ing
AU - Chen, Wei Cheng
AU - Chang, Ching Hong
AU - Liu, Wen Chau
PY - 2018/2
Y1 - 2018/2
N2 - An aluminum-doped zinc oxide (AZO) thin-film-based formaldehyde sensor prepared using radio-frequency sputtering (RF) is studied. The proposed device has a very high formaldehyde sensing response of 95.5 (@20 ppm HCHO/air, 350 °C), an extremely low detection limit (≤40 ppb HCHO/air), a relatively low operating temperature (≤350 °C), and a wide sensing range. Moreover, the device has a simple structure and is easily fabricated, low cost, and environmentally friendly. Therefore, the proposed AZO thin-film-based sensor is promising for high-performance formaldehyde sensing applications.
AB - An aluminum-doped zinc oxide (AZO) thin-film-based formaldehyde sensor prepared using radio-frequency sputtering (RF) is studied. The proposed device has a very high formaldehyde sensing response of 95.5 (@20 ppm HCHO/air, 350 °C), an extremely low detection limit (≤40 ppb HCHO/air), a relatively low operating temperature (≤350 °C), and a wide sensing range. Moreover, the device has a simple structure and is easily fabricated, low cost, and environmentally friendly. Therefore, the proposed AZO thin-film-based sensor is promising for high-performance formaldehyde sensing applications.
UR - http://www.scopus.com/inward/record.url?scp=85030623822&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=85030623822&partnerID=8YFLogxK
U2 - 10.1016/j.snb.2017.09.125
DO - 10.1016/j.snb.2017.09.125
M3 - Article
AN - SCOPUS:85030623822
VL - 255
SP - 3017
EP - 3024
JO - Sensors and Actuators, B: Chemical
JF - Sensors and Actuators, B: Chemical
SN - 0925-4005
ER -