Formation and observation of thermal bubble from multilayer heating material

C. K. Chung, E. C. Chang, B. H. Zou

研究成果: Conference contribution

摘要

The target of this research is to design and fabricate the micro-heater and its electrodes in order to study the thermal bubble behavior. In fabrication of micro-heater, this research focus on the design of multilayer micro-heater and the selection of materials further. For the multilayer materials, we choose Ti/Al/Ta (15/25/200 nm/nm/nm) to be the material to replace the conventional polysilicon, Ta or expensive Pt heaters for improving the heat-resistant ability of Pt, poor adhesion of Ta and high electrical resistance of polysilicon. Then, the bubble sizes between frequencies and voltages were discussed in the multilayer heating materials. The multilayer micro-heater in this research can generate good bubbles at low frequencies operation. It has the advantages of low electrical resistance, the good thermal resistance, and the good heat dissipation to contribute to improve the poor heat dissipation and strength of the Pt microheater in order to increase the life of the heater.

原文English
主出版物標題2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010
頁面684-687
頁數4
DOIs
出版狀態Published - 2010 十一月 29
事件5th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010 - Xiamen, China
持續時間: 2010 一月 202010 一月 23

出版系列

名字2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010

Other

Other5th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010
國家/地區China
城市Xiamen
期間10-01-2010-01-23

All Science Journal Classification (ASJC) codes

  • 控制與系統工程
  • 電氣與電子工程

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