Frequency response and mode shape characterization for acoustic sensor in micro-opto-mechanical technology

C. H. Huang, H. Gao, R. Haouari, B. Troia, S. Mao, R. Jansen, V. Rochus, X. Rottenberg

研究成果: Conference contribution

2 引文 斯高帕斯(Scopus)

摘要

This paper presents the characterization of frequency response and mode shape at the 1st harmonic frequency of a Micro-Opto-Mechanical Acoustic Sensors (MOMAS) with a Mach-Zehnder Interferometer (MZI) readout system. In previous research, the static modeling and characterization has been demonstrated. In this paper, we investigate the capability of using MOMAS in ultrasound domain as a Micro-Opto-Mechanical Acoustic Sensor (MOMAS). We characterize the resonance frequency and mode shapes of three MOMAS by using a laser Doppler vibrometer(LDV) and a piezo shaker. The resonance frequencies range from 75kHz to 262kHz and the mode shapes are between a standard circular plate and a membrane mode. The results are compared with analytical models and finite element simulations to examine the effect of residual stress.

原文English
主出版物標題2017 IEEE International Ultrasonics Symposium, IUS 2017
發行者IEEE Computer Society
ISBN(電子)9781538633830
DOIs
出版狀態Published - 2017 十月 31
事件2017 IEEE International Ultrasonics Symposium, IUS 2017 - Washington, United States
持續時間: 2017 九月 62017 九月 9

出版系列

名字IEEE International Ultrasonics Symposium, IUS
ISSN(列印)1948-5719
ISSN(電子)1948-5727

Other

Other2017 IEEE International Ultrasonics Symposium, IUS 2017
國家United States
城市Washington
期間17-09-0617-09-09

All Science Journal Classification (ASJC) codes

  • Acoustics and Ultrasonics

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  • 引用此

    Huang, C. H., Gao, H., Haouari, R., Troia, B., Mao, S., Jansen, R., Rochus, V., & Rottenberg, X. (2017). Frequency response and mode shape characterization for acoustic sensor in micro-opto-mechanical technology. 於 2017 IEEE International Ultrasonics Symposium, IUS 2017 [8092985] (IEEE International Ultrasonics Symposium, IUS). IEEE Computer Society. https://doi.org/10.1109/ULTSYM.2017.8092985