The trend in design of 300-mm wafer fabrication facilities is to seek means to bring about economies of scale. However, this may require trade-offs with various operational efficiencies. This research explores 10 alternative layout designs for a large 300-mm fabrication facility. These alternatives are the different combinations of independent and layer-based cellular design concepts, and are evaluated using a fuzzy multiple attribute decision-making method. A case study has been adopted for an empirical illustration. The results show that a megafab is not a preferred choice. The analysis concludes that a moderate-sized independent cell is a preferred design concept. The results provide fabrication facility management with guidelines for a future 300-mm layout design, which is the backbone of a cost-intensive 300-mm fabrication facility. Future research opportunities are also addressed.
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