Gallium Nitride Diffractive Microlenses Using in Ultraviolet Micro-Optics System

Chia Hung Hou, Ming Hung Li, Chii Chang Chen, Jenq Yang Chang, Jinn Kong Sheu, Gou Chung Chi, Chuck Wu, Wei Tai Cheng, Jui Hung Yeh

研究成果: Article

3 引文 斯高帕斯(Scopus)

摘要

In this work, diffractive microlenses were fabricated in GaN using a gray-level mask and inductively coupled plasma etching technique. We also propose to insert the GaN/AlN band- pass filter in the microlenses to enhance the ultraviolet/visible rejection ratio. Due to high transparency of GaN and AlN in UV, the microlenses can potentially be used in a UV micro-optics system such as for solar-blind detection. In the design example of this work, the structure may enhance the ultaviolet/visible rejection to 102.

原文English
頁(從 - 到)287-289
頁數3
期刊Optical Review
10
發行號4
DOIs
出版狀態Published - 2003 一月 1

All Science Journal Classification (ASJC) codes

  • Atomic and Molecular Physics, and Optics

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    Hou, C. H., Li, M. H., Chen, C. C., Chang, J. Y., Sheu, J. K., Chi, G. C., Wu, C., Cheng, W. T., & Yeh, J. H. (2003). Gallium Nitride Diffractive Microlenses Using in Ultraviolet Micro-Optics System. Optical Review, 10(4), 287-289. https://doi.org/10.1007/s10043-003-0287-1