GaN grown on Si(1 1 1) with step-graded AlGaN intermediate layers

C. C. Huang, S. J. Chang, R. W. Chuang, J. C. Lin, Y. C. Cheng, W. J. Lin

研究成果: Article同行評審

25 引文 斯高帕斯(Scopus)

摘要

The authors report the growth of crack-free GaN on Si(1 1 1) substrate with step-graded AlGaN intermediate layers all grown at 1120 °C. By preparing all these layers at high-temperature, we can simplify the growth proceduce and minimize the growth time. Using X-ray diffraction and transmission electron microscopy, it was found that the high-temperature step-graded AlGaN intermediate layers can effectively reduce the tensile stress on GaN epitaxial layers. Photoluminescence and Raman measurements also indicate that we can improve the crystal quality of GaN by inserting the step-graded AlGaN intermediate layers.

原文English
頁(從 - 到)6367-6370
頁數4
期刊Applied Surface Science
256
發行號21
DOIs
出版狀態Published - 2010 8月 15

All Science Journal Classification (ASJC) codes

  • 一般化學
  • 凝聚態物理學
  • 一般物理與天文學
  • 表面和介面
  • 表面、塗料和薄膜

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