Gas flow sensing with a piezoresistive micro-cantilever

Yu Hslang Wang, Chia Yen Lee, Rong Hua Ma, Lung Ming Fu

研究成果: Conference contribution

2 引文 斯高帕斯(Scopus)

摘要

This study exploits a bending-up cantilever caused by residual stress to manufacture a micro gas flow sensor. MEMS techniques are used to deposit a silicon nitride layer on a silicon wafer to create a piezoresistive structure. A platinum layer is deposited on the silicon nitride layer to form a resistor and the structure is then etched to form a freestanding micro-cantilever. When an airflow passes over the cantilever beam, a deformation of the resistor occurs. Variations in the airflow velocity are then determined by measuring the corresponding change in the resistance using an LCR meter. The experimental data indicate that the proposed gas flow sensor has a high sensitivity (0.0533 Ω/ms-1) and a high measurement limit (45 ms-1).

原文English
主出版物標題2006 5th IEEE Conference on Sensors
頁面1448-1451
頁數4
DOIs
出版狀態Published - 2006
事件2006 5th IEEE Conference on Sensors - Daegu, Korea, Republic of
持續時間: 2006 10月 222006 10月 25

出版系列

名字Proceedings of IEEE Sensors

Other

Other2006 5th IEEE Conference on Sensors
國家/地區Korea, Republic of
城市Daegu
期間06-10-2206-10-25

All Science Journal Classification (ASJC) codes

  • 電氣與電子工程

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