Gas sensing characteristics of copper phthalocyanine films: Effects of film thickness and sensing temperature

Yuh Lang Lee, Chuan Yi Sheu, Rung Hwa Hsiao

研究成果: Article

68 引文 斯高帕斯(Scopus)


Copper phthalocyanine (CuPc) was vacuum-deposited onto gold patterned glass substrate and used for low temperature operation of NO2 sensing. The effects of film thickness, as well as the sensing temperature, on the sensitivity and recovery characteristics of the CuPc film were investigated. The results show that both film thickness and sensing temperature have significant effect to the sensing characteristics. At room temperature operation, the recovery characteristic is satisfactory for the 50nm film, and it becomes poor as increasing film thickness. Besides, the sensitivity shows little dependence on the film thickness. When the sensing temperature is elevated to 100°C, the recovery ratio of the thicker films can be improved satisfactorily, but the sensitivity of thinner films (50, 100nm) decrease as a result. However, the sensitivity increases notably with increase of film thickness and approaches the maximum value, which is comparable or even superior to that at 25°C, at about 200nm. The present results indicate that the poor recovery characteristic found in the literature can be improved by reducing the film thickness and NO2 doping period. Besides, to get superior sensing properties, a small film thickness (50nm) should be controlled for room temperature operation, but a higher thickness (200nm) is required when the operation is elevated up to 100°C.

頁(從 - 到)281-287
期刊Sensors and Actuators, B: Chemical
出版狀態Published - 2004 五月 1

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Electrical and Electronic Engineering
  • Materials Chemistry

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