TY - JOUR
T1 - Graphene Induced Diamond Nucleation on Tungsten
AU - Tzeng, Yonhua
AU - Chang, Chih Chun
N1 - Publisher Copyright:
© 2020 IEEE.
PY - 2020
Y1 - 2020
N2 - Chemical vapor deposition (CVD) of a diamond film on a non-diamond substrate begins with the insertion of diamond seeds or the formation of diamond nuclei on the substrate. For the deposition of a smooth, large-area and pin-hole free diamond film that adheres well to the substrate, diamond seeds or nuclei need to be of high density, uniformly distributed and adhere well to the substrate. Diamond seeding is not a diamond nucleation process. Bias enhanced nucleation (BEN) is the most effective means of heterogeneous nucleation of diamond for CVD diamond. It is based on a negative biasing voltage between the substrate and the diamond CVD plasma to accelerate positive ions from the plasma to bombard the substrate. Both direct diamond seeding and BEN have technical barriers in practical applications. New diamond nucleation techniques are desired. This paper reports novel heterogenous diamond nucleation along edge line of graphene on tungsten leading to the deposition of continuous diamond films. Based on experimental observation, a diamond nucleation mechanism assisted by sp3 C-W bonds at graphene edge is proposed. It is wished that scientists will become interested in revealing the precise diamond nucleation mechanism. With that, further optimization of this invention may lead to a new, complementary diamond nucleation process for practical deposition of diamond films.
AB - Chemical vapor deposition (CVD) of a diamond film on a non-diamond substrate begins with the insertion of diamond seeds or the formation of diamond nuclei on the substrate. For the deposition of a smooth, large-area and pin-hole free diamond film that adheres well to the substrate, diamond seeds or nuclei need to be of high density, uniformly distributed and adhere well to the substrate. Diamond seeding is not a diamond nucleation process. Bias enhanced nucleation (BEN) is the most effective means of heterogeneous nucleation of diamond for CVD diamond. It is based on a negative biasing voltage between the substrate and the diamond CVD plasma to accelerate positive ions from the plasma to bombard the substrate. Both direct diamond seeding and BEN have technical barriers in practical applications. New diamond nucleation techniques are desired. This paper reports novel heterogenous diamond nucleation along edge line of graphene on tungsten leading to the deposition of continuous diamond films. Based on experimental observation, a diamond nucleation mechanism assisted by sp3 C-W bonds at graphene edge is proposed. It is wished that scientists will become interested in revealing the precise diamond nucleation mechanism. With that, further optimization of this invention may lead to a new, complementary diamond nucleation process for practical deposition of diamond films.
UR - http://www.scopus.com/inward/record.url?scp=85115635913&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=85115635913&partnerID=8YFLogxK
U2 - 10.1109/OJNANO.2020.3038055
DO - 10.1109/OJNANO.2020.3038055
M3 - Article
AN - SCOPUS:85115635913
SN - 2644-1292
VL - 1
SP - 117
EP - 127
JO - IEEE Open Journal of Nanotechnology
JF - IEEE Open Journal of Nanotechnology
M1 - 9258917
ER -