Growth and characterization of GaN-based structures on SiCOI-engineered substrates

Y. Dikme, P. Van Gemmern, Y. C. Lin, A. Szymakowski, H. Kalisch, B. Faure, C. Richtarch, H. Larhèche, P. Bove, F. Letertre, J. F. Woitok, K. Efthimiadis, R. H. Jansen, M. Heuken

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4 引文 斯高帕斯(Scopus)

摘要

Silicon carbide (SiC) still shows the best properties as substrate for the growth of GaN and its alloys but suffers from a very high price. An innovative alternative for this substrate are SiC/SiO2/Si (SiCOI) substrates, combining SiC and Si (silicon) substrate advantages thanks to the Smart Cut™ technology. These substrates consist of thin SiC layers (∼270nm) bonded on (001) Si substrates. Using SiCOI substrates, up to 3 μm of GaN could be grown crack-free. The structures were investigated by atomic force microscopy (root mean square=0.86 nm), high-resolution X-ray diffraction and low-temperature (20 K) photoluminescence (PL) (FWHM (full-width at half-maximum)=4.9 meV). Electroluminescence test heterostructures consisting of InGaN/GaN multiple quantum wells (MQWs) were also deposited on SiCOI. Room temperature PL measurements resulted in a QW emission at around 440 nm with a FWHM of 7.8nm. At electrical excitation, blue light emission was observed.

原文English
頁(從 - 到)500-505
頁數6
期刊Journal of Crystal Growth
272
發行號1-4 SPEC. ISS.
DOIs
出版狀態Published - 2004 十二月 10

All Science Journal Classification (ASJC) codes

  • 凝聚態物理學
  • 無機化學
  • 材料化學

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