Growth of 3C-SiC films on Si substrates by vapor-liquid-solid tri-phase epitaxy

Yu Ling Liang, Shih Zong Lu, Hsin Ying Lee, Xiaoding Qi, Jow Lay Huang

研究成果: Article同行評審

5 引文 斯高帕斯(Scopus)

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Engineering & Materials Science

Chemical Compounds