Growth of carbon nanotubes using microwave plasma-enhanced chemical vapor deposition process

Ruo Mei Liu, Jyh Ming Ting

研究成果: Article

9 引文 斯高帕斯(Scopus)

摘要

Carbon nanotubes were grown on Si substrates using a plasma enhanced chemical vapor deposition technique under various gaseous compositions, microwave powers, and pressures. An iron-containing compound was used as the catalyst. The hydrocarbon used was methane. The resulting carbon nanotubes were examined using scanning electron microscopy and transmission electron microscopy. The diameters of carbon nanotubes (CNTs) were found to be dominated by methane concentration and plasma power. It was also found that the catalyst particles were deformed during the growth of CNTs which led to a sheath growth mechanism.

原文English
頁(從 - 到)571-574
頁數4
期刊Materials Chemistry and Physics
82
發行號3
DOIs
出版狀態Published - 2003 十二月 20

All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Condensed Matter Physics

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