Growth of diamond film by a plug-flow flat flame method

Franklin Chau Nan Hong, Hon Ming Chang, Jing Chuang Hsieh, Jen Haw Hwang, Jih Jen Wu

研究成果: Article

6 引文 (Scopus)

摘要

The conventional acetylene-oxygen mixture torch flame can grow diamond film at fast rates, but it suffers from problems such as small area coverage, non-uniform growth, and poor reproducibility due to the large concentration and temperature gradients. Considering the effects of momentum, heat and mass transfer in the flame, we proposed to study diamond growth by the plug-flow flat flame method. Our results indicated that, owing to the large burning velocity of the acetylene-oxygen mixture, dilution was required for resonable gas consumption. The growth of uniform diamond films by a flat flame method was successful. Dilution, however, reduced the growth rate of diamond significantly and the crystal qualities deteriorated. The effects of dilution gases were studied by comparing nitrogen and argon. Argon was more favorable for diamond growth than nitrogen. The possible reasons will be discussed.

原文English
頁(從 - 到)127-132
頁數6
期刊Thin Solid Films
212
發行號1-2
DOIs
出版狀態Published - 1992 五月 15

指紋

Diamond films
plugs
diamond films
Diamond
flames
Dilution
Acetylene
Diamonds
Argon
dilution
diamonds
Nitrogen
acetylene
Gases
Oxygen
argon
Momentum transfer
nitrogen
torches
Thermal gradients

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Materials Chemistry

引用此文

Hong, Franklin Chau Nan ; Chang, Hon Ming ; Hsieh, Jing Chuang ; Hwang, Jen Haw ; Wu, Jih Jen. / Growth of diamond film by a plug-flow flat flame method. 於: Thin Solid Films. 1992 ; 卷 212, 編號 1-2. 頁 127-132.
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Growth of diamond film by a plug-flow flat flame method. / Hong, Franklin Chau Nan; Chang, Hon Ming; Hsieh, Jing Chuang; Hwang, Jen Haw; Wu, Jih Jen.

於: Thin Solid Films, 卷 212, 編號 1-2, 15.05.1992, p. 127-132.

研究成果: Article

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AU - Chang, Hon Ming

AU - Hsieh, Jing Chuang

AU - Hwang, Jen Haw

AU - Wu, Jih Jen

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AB - The conventional acetylene-oxygen mixture torch flame can grow diamond film at fast rates, but it suffers from problems such as small area coverage, non-uniform growth, and poor reproducibility due to the large concentration and temperature gradients. Considering the effects of momentum, heat and mass transfer in the flame, we proposed to study diamond growth by the plug-flow flat flame method. Our results indicated that, owing to the large burning velocity of the acetylene-oxygen mixture, dilution was required for resonable gas consumption. The growth of uniform diamond films by a flat flame method was successful. Dilution, however, reduced the growth rate of diamond significantly and the crystal qualities deteriorated. The effects of dilution gases were studied by comparing nitrogen and argon. Argon was more favorable for diamond growth than nitrogen. The possible reasons will be discussed.

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