Growth of Large-Area Graphene Single Crystals in Confined Reaction Space with Diffusion-Driven Chemical Vapor Deposition

Chiao Chen Chen, Chia Jung Kuo, Chun Da Liao, Chin Fu Chang, Chi Ang Tseng, Chia Rung Liu, Yit Tsong Chen

研究成果: Article同行評審

44 引文 斯高帕斯(Scopus)

摘要

To synthesize large-area graphene single crystals, we specifically designed a low-pressure chemical vapor deposition (LPCVD) reactor with confined reaction space (L 22 mm × W 13 mm × H 50 m). Within the confined reaction space, a uniform distribution of reactant concentrations, reduced substrate roughness, and the shift of growth kinetics toward a diffusion-limited regime can be achieved, favoring the preparation of large-area, high-quality graphene single crystals. The gas flow field and mass transport pattern of reactants in the LPCVD system simulated with a finite element method support the advantages of using this confined reaction room for graphene growth. Using this space-confined reactor together with the optimized synthesis parameters, we obtained monolayer, highly uniform, and defect-free graphene single crystals of up to ∼0.8 mm in diameter with the field-effect mobility of μEF ∼ 4800 cm2 V-1 s-1 at room temperature. In addition, structural design of the confined reaction space by adjusting the reactor's dimensions is of facile controllability and scalability, which demonstrates the superiority and preference of this method for industrial applications.

原文English
頁(從 - 到)6249-6258
頁數10
期刊Chemistry of Materials
27
發行號18
DOIs
出版狀態Published - 2015 九月 22

All Science Journal Classification (ASJC) codes

  • 化學 (全部)
  • 化學工程 (全部)
  • 材料化學

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