Growth of Large-Area Graphene Single Crystals in Confined Reaction Space with Diffusion-Driven Chemical Vapor Deposition

Chiao Chen Chen, Chia Jung Kuo, Chun Da Liao, Chin Fu Chang, Chi Ang Tseng, Chia Rung Liu, Yit Tsong Chen

研究成果: Article

33 引文 (Scopus)

摘要

To synthesize large-area graphene single crystals, we specifically designed a low-pressure chemical vapor deposition (LPCVD) reactor with confined reaction space (L 22 mm × W 13 mm × H 50 m). Within the confined reaction space, a uniform distribution of reactant concentrations, reduced substrate roughness, and the shift of growth kinetics toward a diffusion-limited regime can be achieved, favoring the preparation of large-area, high-quality graphene single crystals. The gas flow field and mass transport pattern of reactants in the LPCVD system simulated with a finite element method support the advantages of using this confined reaction room for graphene growth. Using this space-confined reactor together with the optimized synthesis parameters, we obtained monolayer, highly uniform, and defect-free graphene single crystals of up to ∼0.8 mm in diameter with the field-effect mobility of μEF ∼ 4800 cm2 V-1 s-1 at room temperature. In addition, structural design of the confined reaction space by adjusting the reactor's dimensions is of facile controllability and scalability, which demonstrates the superiority and preference of this method for industrial applications.

原文English
頁(從 - 到)6249-6258
頁數10
期刊Chemistry of Materials
27
發行號18
DOIs
出版狀態Published - 2015 九月 22

指紋

Graphite
Graphene
Chemical vapor deposition
Single crystals
Low pressure chemical vapor deposition
Growth kinetics
Controllability
Structural design
Industrial applications
Flow of gases
Scalability
Monolayers
Flow fields
Mass transfer
Surface roughness
Finite element method
Defects
Substrates
Temperature

All Science Journal Classification (ASJC) codes

  • Chemistry(all)
  • Chemical Engineering(all)
  • Materials Chemistry

引用此文

Chen, Chiao Chen ; Kuo, Chia Jung ; Liao, Chun Da ; Chang, Chin Fu ; Tseng, Chi Ang ; Liu, Chia Rung ; Chen, Yit Tsong. / Growth of Large-Area Graphene Single Crystals in Confined Reaction Space with Diffusion-Driven Chemical Vapor Deposition. 於: Chemistry of Materials. 2015 ; 卷 27, 編號 18. 頁 6249-6258.
@article{fa608186353d455cb4979111212ac30a,
title = "Growth of Large-Area Graphene Single Crystals in Confined Reaction Space with Diffusion-Driven Chemical Vapor Deposition",
abstract = "To synthesize large-area graphene single crystals, we specifically designed a low-pressure chemical vapor deposition (LPCVD) reactor with confined reaction space (L 22 mm × W 13 mm × H 50 m). Within the confined reaction space, a uniform distribution of reactant concentrations, reduced substrate roughness, and the shift of growth kinetics toward a diffusion-limited regime can be achieved, favoring the preparation of large-area, high-quality graphene single crystals. The gas flow field and mass transport pattern of reactants in the LPCVD system simulated with a finite element method support the advantages of using this confined reaction room for graphene growth. Using this space-confined reactor together with the optimized synthesis parameters, we obtained monolayer, highly uniform, and defect-free graphene single crystals of up to ∼0.8 mm in diameter with the field-effect mobility of μEF ∼ 4800 cm2 V-1 s-1 at room temperature. In addition, structural design of the confined reaction space by adjusting the reactor's dimensions is of facile controllability and scalability, which demonstrates the superiority and preference of this method for industrial applications.",
author = "Chen, {Chiao Chen} and Kuo, {Chia Jung} and Liao, {Chun Da} and Chang, {Chin Fu} and Tseng, {Chi Ang} and Liu, {Chia Rung} and Chen, {Yit Tsong}",
year = "2015",
month = "9",
day = "22",
doi = "10.1021/acs.chemmater.5b01430",
language = "English",
volume = "27",
pages = "6249--6258",
journal = "Chemistry of Materials",
issn = "0897-4756",
publisher = "American Chemical Society",
number = "18",

}

Growth of Large-Area Graphene Single Crystals in Confined Reaction Space with Diffusion-Driven Chemical Vapor Deposition. / Chen, Chiao Chen; Kuo, Chia Jung; Liao, Chun Da; Chang, Chin Fu; Tseng, Chi Ang; Liu, Chia Rung; Chen, Yit Tsong.

於: Chemistry of Materials, 卷 27, 編號 18, 22.09.2015, p. 6249-6258.

研究成果: Article

TY - JOUR

T1 - Growth of Large-Area Graphene Single Crystals in Confined Reaction Space with Diffusion-Driven Chemical Vapor Deposition

AU - Chen, Chiao Chen

AU - Kuo, Chia Jung

AU - Liao, Chun Da

AU - Chang, Chin Fu

AU - Tseng, Chi Ang

AU - Liu, Chia Rung

AU - Chen, Yit Tsong

PY - 2015/9/22

Y1 - 2015/9/22

N2 - To synthesize large-area graphene single crystals, we specifically designed a low-pressure chemical vapor deposition (LPCVD) reactor with confined reaction space (L 22 mm × W 13 mm × H 50 m). Within the confined reaction space, a uniform distribution of reactant concentrations, reduced substrate roughness, and the shift of growth kinetics toward a diffusion-limited regime can be achieved, favoring the preparation of large-area, high-quality graphene single crystals. The gas flow field and mass transport pattern of reactants in the LPCVD system simulated with a finite element method support the advantages of using this confined reaction room for graphene growth. Using this space-confined reactor together with the optimized synthesis parameters, we obtained monolayer, highly uniform, and defect-free graphene single crystals of up to ∼0.8 mm in diameter with the field-effect mobility of μEF ∼ 4800 cm2 V-1 s-1 at room temperature. In addition, structural design of the confined reaction space by adjusting the reactor's dimensions is of facile controllability and scalability, which demonstrates the superiority and preference of this method for industrial applications.

AB - To synthesize large-area graphene single crystals, we specifically designed a low-pressure chemical vapor deposition (LPCVD) reactor with confined reaction space (L 22 mm × W 13 mm × H 50 m). Within the confined reaction space, a uniform distribution of reactant concentrations, reduced substrate roughness, and the shift of growth kinetics toward a diffusion-limited regime can be achieved, favoring the preparation of large-area, high-quality graphene single crystals. The gas flow field and mass transport pattern of reactants in the LPCVD system simulated with a finite element method support the advantages of using this confined reaction room for graphene growth. Using this space-confined reactor together with the optimized synthesis parameters, we obtained monolayer, highly uniform, and defect-free graphene single crystals of up to ∼0.8 mm in diameter with the field-effect mobility of μEF ∼ 4800 cm2 V-1 s-1 at room temperature. In addition, structural design of the confined reaction space by adjusting the reactor's dimensions is of facile controllability and scalability, which demonstrates the superiority and preference of this method for industrial applications.

UR - http://www.scopus.com/inward/record.url?scp=84942101426&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84942101426&partnerID=8YFLogxK

U2 - 10.1021/acs.chemmater.5b01430

DO - 10.1021/acs.chemmater.5b01430

M3 - Article

AN - SCOPUS:84942101426

VL - 27

SP - 6249

EP - 6258

JO - Chemistry of Materials

JF - Chemistry of Materials

SN - 0897-4756

IS - 18

ER -