Hierarchical micro- and nanoscale structures on surfaces produced using a one-step pattern transfer process

Jie-Ren Li, Nai Ning Yin, Gang Yu Liu

研究成果: Article

10 引文 (Scopus)

摘要

A one-step pattern transfer process was developed to produce arrays of hierarchical micro- and nanostructures of organosilanes. The method is based on vapor deposition through polydimethylsiloxane stamps coated with close-packed nanospheres and, as such, creating hierarchical microscale and nanoscale templates, respectively. This method offers intrinsic advantages of simplicity to be used in any laboratory environment and high throughput, that is, a 1 in. wafer can be covered in 6 h. In addition, the size and geometry can be controlled via knowledge of microcontact printing and particle lithography. Finally, the approach is generic in nature and may be utilized to produce designed functionalities.

原文English
頁(從 - 到)289-294
頁數6
期刊Journal of Physical Chemistry Letters
2
發行號4
DOIs
出版狀態Published - 2011 二月 17

指紋

Vapor deposition
Nanospheres
Polydimethylsiloxane
printing
microbalances
Lithography
Printing
Nanostructures
templates
lithography
Throughput
vapor deposition
wafers
microstructure
Microstructure
Geometry
geometry
baysilon

All Science Journal Classification (ASJC) codes

  • Materials Science(all)

引用此文

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