High contrast long-period waveguide gratings on silicon-on-insulator (SOI) substrates

Ricky W. Chuang, Guo Shian Wang, Mao Teng Hsu

研究成果: Conference contribution

摘要

We report the practicality of fabricating the long-period waveguide gratings (LPWGs) on silicon-on-insulator (SOI) substrates with amorphous silicon (a-Si) layer incorporated as a cladding layer. Specifically, the devices are etched and patterned on SOI wafer via an anisotropic wet etching technique, while the a-Si is deposited using plasma-enhanced chemical vapor deposition (PECVD) system. The experimental results later confirm that the LPWG devices resonate within a wavelength range between 1563 and 1580nm and the LPWG waveguide with a width of 8μm has delivered a dip contrast as high as 30 dB and the FWHM as narrow as 1.76nm, as the input light is polarized as transverse electric (TE) wave. With the transverse magnetic (TM) polarized wave provided as an input, the LPWG waveguide with the width of 10μm yields a dip contrast as high as 14.5 dB and its FWHM measured is as narrow as 1.32nm.

原文English
主出版物標題2012 Photonics Global Conference, PGC 2012
DOIs
出版狀態Published - 2012 12月 1
事件2012 Photonics Global Conference, PGC 2012 - Singapore, Singapore
持續時間: 2012 12月 132012 12月 16

出版系列

名字2012 Photonics Global Conference, PGC 2012

Other

Other2012 Photonics Global Conference, PGC 2012
國家/地區Singapore
城市Singapore
期間12-12-1312-12-16

All Science Journal Classification (ASJC) codes

  • 電氣與電子工程

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