@article{79bab313a860454ba463fa56e5491430,
title = "High Density Novel Porous ZnO Nanosheets Based on a Microheater Chip for Ozone Sensors",
abstract = "High-density porous zinc oxide (ZnO) nanosheets (NSs) are grown on an aluminum (Al) substrate, and a porous ZnO NS-based microelectromechanical systems technology gas sensor is fabricated for ozone (O3) detection. The height of this new ZnO nanostructure can be controlled by using different thicknesses of an Al seedlayer ranging from 25 to 100 nm. Additionally, the results indicate that an increase in the ozone response depends on oxygen vacancy adsorption, as measured by photoluminescence emission. This paper resulted in a low-temperature, hydrothermally grown novel porous ZnO NS ozone gas sensor that measured O3 responses of 96.1% at 300 °C and 53.4% at 150 °C. The response of this sensor compared with the responses of other semiconductor metal oxide materials is also very significant, with the porous ZnO NSs showing potential applications in gas sensing devices used for environmental monitoring.",
author = "Tsai, {You Ting} and Chang, {Shoou Jinn} and Tang, {I. Tseng} and Hsiao, {Yu Jen} and Ji, {Liang Wen}",
note = "Funding Information: Manuscript received March 23, 2018; accepted April 21, 2018. Date of publication April 26, 2018; date of current version June 12, 2018. This work was supported in part by the Advanced Optoelectronic Technology Center, NCKU, under projects from the Ministry of Education, Taiwan. The associate editor coordinating the review of this paper and approving it for publication was Dr. Ioannis Raptis. (Corresponding authors: Yu-Jen Hsiao; Liang-Wen Ji.) Y.-T. Tsai and S.-J. Chang are with the Advanced Optoelectronic Technology Center, Research Center for Energy Technology and Strategy, Department of Electrical Engineering, Institute of Microelectronics, National Cheng Kung University, Tainan 701, Taiwan (e-mail: tonytsai1992@gmail.com; changsj@mail.ncku.edu.tw). Publisher Copyright: {\textcopyright} 2001-2012 IEEE.",
year = "2018",
month = jul,
day = "1",
doi = "10.1109/JSEN.2018.2830508",
language = "English",
volume = "18",
pages = "5559--5565",
journal = "IEEE Sensors Journal",
issn = "1530-437X",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
number = "13",
}