High Density Novel Porous ZnO Nanosheets Based on a Microheater Chip for Ozone Sensors

You Ting Tsai, Shoou-Jinn Chang, I. Tseng Tang, Yu Jen Hsiao, Liang Wen Ji

研究成果: Article

9 引文 (Scopus)

摘要

High-density porous zinc oxide (ZnO) nanosheets (NSs) are grown on an aluminum (Al) substrate, and a porous ZnO NS-based microelectromechanical systems technology gas sensor is fabricated for ozone (O3) detection. The height of this new ZnO nanostructure can be controlled by using different thicknesses of an Al seedlayer ranging from 25 to 100 nm. Additionally, the results indicate that an increase in the ozone response depends on oxygen vacancy adsorption, as measured by photoluminescence emission. This paper resulted in a low-temperature, hydrothermally grown novel porous ZnO NS ozone gas sensor that measured O3 responses of 96.1% at 300 °C and 53.4% at 150 °C. The response of this sensor compared with the responses of other semiconductor metal oxide materials is also very significant, with the porous ZnO NSs showing potential applications in gas sensing devices used for environmental monitoring.

原文English
頁(從 - 到)5559-5565
頁數7
期刊IEEE Sensors Journal
18
發行號13
DOIs
出版狀態Published - 2018 七月 1

指紋

Nanosheets
Zinc oxide
zinc oxides
Ozone
ozone
chips
sensors
Sensors
Chemical sensors
gases
aluminum
Aluminum
environmental monitoring
Oxygen vacancies
metal oxide semiconductors
microelectromechanical systems
MEMS
Nanostructures
Photoluminescence
Semiconductor materials

All Science Journal Classification (ASJC) codes

  • Instrumentation
  • Electrical and Electronic Engineering

引用此文

Tsai, You Ting ; Chang, Shoou-Jinn ; Tang, I. Tseng ; Hsiao, Yu Jen ; Ji, Liang Wen. / High Density Novel Porous ZnO Nanosheets Based on a Microheater Chip for Ozone Sensors. 於: IEEE Sensors Journal. 2018 ; 卷 18, 編號 13. 頁 5559-5565.
@article{79bab313a860454ba463fa56e5491430,
title = "High Density Novel Porous ZnO Nanosheets Based on a Microheater Chip for Ozone Sensors",
abstract = "High-density porous zinc oxide (ZnO) nanosheets (NSs) are grown on an aluminum (Al) substrate, and a porous ZnO NS-based microelectromechanical systems technology gas sensor is fabricated for ozone (O3) detection. The height of this new ZnO nanostructure can be controlled by using different thicknesses of an Al seedlayer ranging from 25 to 100 nm. Additionally, the results indicate that an increase in the ozone response depends on oxygen vacancy adsorption, as measured by photoluminescence emission. This paper resulted in a low-temperature, hydrothermally grown novel porous ZnO NS ozone gas sensor that measured O3 responses of 96.1{\%} at 300 °C and 53.4{\%} at 150 °C. The response of this sensor compared with the responses of other semiconductor metal oxide materials is also very significant, with the porous ZnO NSs showing potential applications in gas sensing devices used for environmental monitoring.",
author = "Tsai, {You Ting} and Shoou-Jinn Chang and Tang, {I. Tseng} and Hsiao, {Yu Jen} and Ji, {Liang Wen}",
year = "2018",
month = "7",
day = "1",
doi = "10.1109/JSEN.2018.2830508",
language = "English",
volume = "18",
pages = "5559--5565",
journal = "IEEE Sensors Journal",
issn = "1530-437X",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
number = "13",

}

High Density Novel Porous ZnO Nanosheets Based on a Microheater Chip for Ozone Sensors. / Tsai, You Ting; Chang, Shoou-Jinn; Tang, I. Tseng; Hsiao, Yu Jen; Ji, Liang Wen.

於: IEEE Sensors Journal, 卷 18, 編號 13, 01.07.2018, p. 5559-5565.

研究成果: Article

TY - JOUR

T1 - High Density Novel Porous ZnO Nanosheets Based on a Microheater Chip for Ozone Sensors

AU - Tsai, You Ting

AU - Chang, Shoou-Jinn

AU - Tang, I. Tseng

AU - Hsiao, Yu Jen

AU - Ji, Liang Wen

PY - 2018/7/1

Y1 - 2018/7/1

N2 - High-density porous zinc oxide (ZnO) nanosheets (NSs) are grown on an aluminum (Al) substrate, and a porous ZnO NS-based microelectromechanical systems technology gas sensor is fabricated for ozone (O3) detection. The height of this new ZnO nanostructure can be controlled by using different thicknesses of an Al seedlayer ranging from 25 to 100 nm. Additionally, the results indicate that an increase in the ozone response depends on oxygen vacancy adsorption, as measured by photoluminescence emission. This paper resulted in a low-temperature, hydrothermally grown novel porous ZnO NS ozone gas sensor that measured O3 responses of 96.1% at 300 °C and 53.4% at 150 °C. The response of this sensor compared with the responses of other semiconductor metal oxide materials is also very significant, with the porous ZnO NSs showing potential applications in gas sensing devices used for environmental monitoring.

AB - High-density porous zinc oxide (ZnO) nanosheets (NSs) are grown on an aluminum (Al) substrate, and a porous ZnO NS-based microelectromechanical systems technology gas sensor is fabricated for ozone (O3) detection. The height of this new ZnO nanostructure can be controlled by using different thicknesses of an Al seedlayer ranging from 25 to 100 nm. Additionally, the results indicate that an increase in the ozone response depends on oxygen vacancy adsorption, as measured by photoluminescence emission. This paper resulted in a low-temperature, hydrothermally grown novel porous ZnO NS ozone gas sensor that measured O3 responses of 96.1% at 300 °C and 53.4% at 150 °C. The response of this sensor compared with the responses of other semiconductor metal oxide materials is also very significant, with the porous ZnO NSs showing potential applications in gas sensing devices used for environmental monitoring.

UR - http://www.scopus.com/inward/record.url?scp=85045989847&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=85045989847&partnerID=8YFLogxK

U2 - 10.1109/JSEN.2018.2830508

DO - 10.1109/JSEN.2018.2830508

M3 - Article

AN - SCOPUS:85045989847

VL - 18

SP - 5559

EP - 5565

JO - IEEE Sensors Journal

JF - IEEE Sensors Journal

SN - 1530-437X

IS - 13

ER -