摘要
High-density porous zinc oxide (ZnO) nanosheets (NSs) are grown on an aluminum (Al) substrate, and a porous ZnO NS-based microelectromechanical systems technology gas sensor is fabricated for ozone (O3) detection. The height of this new ZnO nanostructure can be controlled by using different thicknesses of an Al seedlayer ranging from 25 to 100 nm. Additionally, the results indicate that an increase in the ozone response depends on oxygen vacancy adsorption, as measured by photoluminescence emission. This paper resulted in a low-temperature, hydrothermally grown novel porous ZnO NS ozone gas sensor that measured O3 responses of 96.1% at 300 °C and 53.4% at 150 °C. The response of this sensor compared with the responses of other semiconductor metal oxide materials is also very significant, with the porous ZnO NSs showing potential applications in gas sensing devices used for environmental monitoring.
| 原文 | English |
|---|---|
| 頁（從 - 到） | 5559-5565 |
| 頁數 | 7 |
| 期刊 | IEEE Sensors Journal |
| 卷 | 18 |
| 發行號 | 13 |
| DOIs | |
| 出版狀態 | Published - 2018 七月 1 |
指紋
All Science Journal Classification (ASJC) codes
- Instrumentation
- Electrical and Electronic Engineering
引用此文
}
High Density Novel Porous ZnO Nanosheets Based on a Microheater Chip for Ozone Sensors. / Tsai, You Ting; Chang, Shoou-Jinn; Tang, I. Tseng; Hsiao, Yu Jen; Ji, Liang Wen.
於: IEEE Sensors Journal, 卷 18, 編號 13, 01.07.2018, p. 5559-5565.研究成果: Article
TY - JOUR
T1 - High Density Novel Porous ZnO Nanosheets Based on a Microheater Chip for Ozone Sensors
AU - Tsai, You Ting
AU - Chang, Shoou-Jinn
AU - Tang, I. Tseng
AU - Hsiao, Yu Jen
AU - Ji, Liang Wen
PY - 2018/7/1
Y1 - 2018/7/1
N2 - High-density porous zinc oxide (ZnO) nanosheets (NSs) are grown on an aluminum (Al) substrate, and a porous ZnO NS-based microelectromechanical systems technology gas sensor is fabricated for ozone (O3) detection. The height of this new ZnO nanostructure can be controlled by using different thicknesses of an Al seedlayer ranging from 25 to 100 nm. Additionally, the results indicate that an increase in the ozone response depends on oxygen vacancy adsorption, as measured by photoluminescence emission. This paper resulted in a low-temperature, hydrothermally grown novel porous ZnO NS ozone gas sensor that measured O3 responses of 96.1% at 300 °C and 53.4% at 150 °C. The response of this sensor compared with the responses of other semiconductor metal oxide materials is also very significant, with the porous ZnO NSs showing potential applications in gas sensing devices used for environmental monitoring.
AB - High-density porous zinc oxide (ZnO) nanosheets (NSs) are grown on an aluminum (Al) substrate, and a porous ZnO NS-based microelectromechanical systems technology gas sensor is fabricated for ozone (O3) detection. The height of this new ZnO nanostructure can be controlled by using different thicknesses of an Al seedlayer ranging from 25 to 100 nm. Additionally, the results indicate that an increase in the ozone response depends on oxygen vacancy adsorption, as measured by photoluminescence emission. This paper resulted in a low-temperature, hydrothermally grown novel porous ZnO NS ozone gas sensor that measured O3 responses of 96.1% at 300 °C and 53.4% at 150 °C. The response of this sensor compared with the responses of other semiconductor metal oxide materials is also very significant, with the porous ZnO NSs showing potential applications in gas sensing devices used for environmental monitoring.
UR - http://www.scopus.com/inward/record.url?scp=85045989847&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=85045989847&partnerID=8YFLogxK
U2 - 10.1109/JSEN.2018.2830508
DO - 10.1109/JSEN.2018.2830508
M3 - Article
AN - SCOPUS:85045989847
VL - 18
SP - 5559
EP - 5565
JO - IEEE Sensors Journal
JF - IEEE Sensors Journal
SN - 1530-437X
IS - 13
ER -