High K nanophase zinc oxide on biomimetic silicon nanotip array as supercapacitors

Hsieh Cheng Han, Cheong Wei Chong, Sheng Bo Wang, Dawei Heh, Chi Ang Tseng, Yi Fan Huang, Surojit Chattopadhyay, Kuei Hsien Chen, Chi Feng Lin, Jiun Haw Lee, Li Chyong Chen

研究成果: Article同行評審

20 引文 斯高帕斯(Scopus)


A 3D trenched-structure metal-insulator-metal (MIM) nanocapacitor array with an ultrahigh equivalent planar capacitance (EPC) of ∼300 μF cm -2 is demonstrated. Zinc oxide (ZnO) and aluminum oxide (Al 2O3) bilayer dielectric is deposited on 1 μm high biomimetic silicon nanotip (SiNT) substrate using the atomic layer deposition method. The large EPC is achieved by utilizing the large surface area of the densely packed SiNT (∼5 × 1010 cm-2) coated conformally with an ultrahigh dielectric constant of ZnO. The EPC value is 30 times higher than those previously reported in metal-insulator-metal or metal-insulator-semiconductor nanocapacitors using similar porosity dimensions of the support materials.

頁(從 - 到)1422-1428
期刊Nano letters
出版狀態Published - 2013 四月 10

All Science Journal Classification (ASJC) codes

  • 生物工程
  • 化學 (全部)
  • 材料科學(全部)
  • 凝聚態物理學
  • 機械工業


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