TY - JOUR
T1 - High-performance a-igzo thin-film transistor using Ta2O 5 gate dielectric
AU - Chiu, C. J.
AU - Chang, S. P.
AU - Chang, S. J.
N1 - Funding Information:
Manuscript received May 25, 2010; accepted August 3, 2010. Date of publication September 13, 2010; date of current version October 22, 2010. This work was supported in part by the Center for Frontier Materials and Micro/Nano Science and Technology, National Cheng Kung University, Taiwan, under Grant D97-2700 and in part by the Advanced Optoelectronic Technology Center, National Cheng Kung University, under projects from the Ministry of Education. The review of this letter was arranged by Editor A. Nathan.
PY - 2010/11
Y1 - 2010/11
N2 - In this letter, we report the fabrication of an amorphous indium gallium zinc oxide (a-IGZO) thin-film transistor with a high-κ dielectric layer on a glass substrate. The room-temperature-deposited a-IGZO channel with Ta 2O5 exhibits the following operating characteristics: a threshold voltage of 0.25 V, a drainsource current on/off ratio of 10 5, a subthreshold gate voltage swing of 0.61 V/decade, and a high field-effect mobility of 61.5 cm2/Vċs; these characteristics make it suitable for use as a switching transistor and in low-power applications.
AB - In this letter, we report the fabrication of an amorphous indium gallium zinc oxide (a-IGZO) thin-film transistor with a high-κ dielectric layer on a glass substrate. The room-temperature-deposited a-IGZO channel with Ta 2O5 exhibits the following operating characteristics: a threshold voltage of 0.25 V, a drainsource current on/off ratio of 10 5, a subthreshold gate voltage swing of 0.61 V/decade, and a high field-effect mobility of 61.5 cm2/Vċs; these characteristics make it suitable for use as a switching transistor and in low-power applications.
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U2 - 10.1109/LED.2010.2066951
DO - 10.1109/LED.2010.2066951
M3 - Article
AN - SCOPUS:78049297925
SN - 0741-3106
VL - 31
SP - 1245
EP - 1247
JO - IEEE Electron Device Letters
JF - IEEE Electron Device Letters
IS - 11
M1 - 5570921
ER -