High performance bulk acoustic resonator based on ZnO:Li piezofilms with high crystallinity and uniformity

Chun Cheng Lin, Jian Fu Tang, Sheng-Yuan Chu

研究成果: Conference contribution

1 引文 (Scopus)

摘要

This work describes a bulk acoustic resonator (BAR) based on Pt/L 0.06Z0.94O/Pt/Ti/Si structure. The L0.06Z 0.94O piezofilms are grown by radio frequency magnetron sputtering system and post-treated with ultraviolet (UV)-ozone illumination. The structural and chemical evolutions through various illumination times of the predominantly c-axis orientation LZO films are investigated. The largest piezoelectric coefficient (14.87 pC/N) of the LZO film is obtained after 120 min UV-ozone illumination, which can be ascribed to better crystallization and fewer oxygen-related defects. Furthermore, we adopt the wet chemical etching method and the lift-off process to pattern the piezofilms and electrodes of the BAR device, respectively. The fabricated resonator exhibits high quality factor (Q = 1112) at ∼500 MHz. The experimental results verify the crystallinity and the uniformity of the piezofilms play crucial roles of the BAR devices.

原文English
主出版物標題IEEE Nanotechnology Materials and Devices Conference, IEEE NMDC 2013
發行者IEEE Computer Society
頁面67-69
頁數3
ISBN(列印)9781479933877
DOIs
出版狀態Published - 2013 一月 1
事件2013 IEEE 8th Nanotechnology Materials and Devices Conference, IEEE NMDC 2013 - Tainan, Taiwan
持續時間: 2013 十月 62013 十月 9

出版系列

名字IEEE Nanotechnology Materials and Devices Conference, IEEE NMDC 2013

Other

Other2013 IEEE 8th Nanotechnology Materials and Devices Conference, IEEE NMDC 2013
國家Taiwan
城市Tainan
期間13-10-0613-10-09

指紋

Acoustic resonators
Lighting
Ozone
Wet etching
Magnetron sputtering
Resonators
Crystallization
Defects
Electrodes
Oxygen

All Science Journal Classification (ASJC) codes

  • Mechanics of Materials

引用此文

Lin, C. C., Tang, J. F., & Chu, S-Y. (2013). High performance bulk acoustic resonator based on ZnO:Li piezofilms with high crystallinity and uniformity. 於 IEEE Nanotechnology Materials and Devices Conference, IEEE NMDC 2013 (頁 67-69). [6707456] (IEEE Nanotechnology Materials and Devices Conference, IEEE NMDC 2013). IEEE Computer Society. https://doi.org/10.1109/NMDC.2013.6707456
Lin, Chun Cheng ; Tang, Jian Fu ; Chu, Sheng-Yuan. / High performance bulk acoustic resonator based on ZnO:Li piezofilms with high crystallinity and uniformity. IEEE Nanotechnology Materials and Devices Conference, IEEE NMDC 2013. IEEE Computer Society, 2013. 頁 67-69 (IEEE Nanotechnology Materials and Devices Conference, IEEE NMDC 2013).
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Lin, CC, Tang, JF & Chu, S-Y 2013, High performance bulk acoustic resonator based on ZnO:Li piezofilms with high crystallinity and uniformity. 於 IEEE Nanotechnology Materials and Devices Conference, IEEE NMDC 2013., 6707456, IEEE Nanotechnology Materials and Devices Conference, IEEE NMDC 2013, IEEE Computer Society, 頁 67-69, 2013 IEEE 8th Nanotechnology Materials and Devices Conference, IEEE NMDC 2013, Tainan, Taiwan, 13-10-06. https://doi.org/10.1109/NMDC.2013.6707456

High performance bulk acoustic resonator based on ZnO:Li piezofilms with high crystallinity and uniformity. / Lin, Chun Cheng; Tang, Jian Fu; Chu, Sheng-Yuan.

IEEE Nanotechnology Materials and Devices Conference, IEEE NMDC 2013. IEEE Computer Society, 2013. p. 67-69 6707456 (IEEE Nanotechnology Materials and Devices Conference, IEEE NMDC 2013).

研究成果: Conference contribution

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AB - This work describes a bulk acoustic resonator (BAR) based on Pt/L 0.06Z0.94O/Pt/Ti/Si structure. The L0.06Z 0.94O piezofilms are grown by radio frequency magnetron sputtering system and post-treated with ultraviolet (UV)-ozone illumination. The structural and chemical evolutions through various illumination times of the predominantly c-axis orientation LZO films are investigated. The largest piezoelectric coefficient (14.87 pC/N) of the LZO film is obtained after 120 min UV-ozone illumination, which can be ascribed to better crystallization and fewer oxygen-related defects. Furthermore, we adopt the wet chemical etching method and the lift-off process to pattern the piezofilms and electrodes of the BAR device, respectively. The fabricated resonator exhibits high quality factor (Q = 1112) at ∼500 MHz. The experimental results verify the crystallinity and the uniformity of the piezofilms play crucial roles of the BAR devices.

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Lin CC, Tang JF, Chu S-Y. High performance bulk acoustic resonator based on ZnO:Li piezofilms with high crystallinity and uniformity. 於 IEEE Nanotechnology Materials and Devices Conference, IEEE NMDC 2013. IEEE Computer Society. 2013. p. 67-69. 6707456. (IEEE Nanotechnology Materials and Devices Conference, IEEE NMDC 2013). https://doi.org/10.1109/NMDC.2013.6707456