High-resolution three-degrees-of-freedom motion errors measuring system for a single-axis linear moving platform

H. L. Huang, C. H. Liu, W. Y. Jywe, M. S. Wang

研究成果: Article同行評審

6 引文 斯高帕斯(Scopus)

摘要

In this study, a high-resolution three-degrees-of-freedom (3-DOF) motion error measuring system based on interference is described. It can simultaneously measure the linear displacement and two angular errors of a single-axis linear moving platform. The displacement is measured using a polarization interference technique and the two angular errors are also measured based on the geometry optical theorem. The verification results show that the resolution is about 20nm. The 3-DOF measurement system detected displacements relative to a measurement mirror move with an accuracy of about ±8μm for a measuring range of ± 50mm, and detected the angular errors with a related accuracy of about ± 2 arc sec for a measuring range of ± 100 arc sec.

原文English
頁(從 - 到)107-114
頁數8
期刊Proceedings of the Institution of Mechanical Engineers, Part B: Journal of Engineering Manufacture
223
發行號1
DOIs
出版狀態Published - 2009 一月 1

All Science Journal Classification (ASJC) codes

  • 機械工業
  • 工業與製造工程

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