TY - JOUR
T1 - High sensitivity ethanol gas sensor integrated with a solid-state heater and thermal isolation improvement structure for legal drink-drive limit detecting
AU - Ho, J. J.
AU - Fang, Y. K.
AU - Wu, K. H.
AU - Hsieh, W. T.
AU - Chen, C. H.
AU - Chen, G. S.
AU - Ju, M. S.
AU - Lin, J. J.
AU - Hwang, S. B.
N1 - Funding Information:
The authors acknowledge financial support from The National Science Council of Republic of China under contract No. NSC 87-2218-E-006-017.
Copyright:
Copyright 2021 Elsevier B.V., All rights reserved.
PY - 1998
Y1 - 1998
N2 - The paper reports the successful fabrication of ethanol gas sensors with tin-dioxide (SnO2) thin films integrated with a solid-state heater, which is realized with technologies of micro-electro-mechanical systems (MEMS), and are compatible with VLSI processes. The main sensing part with dimensions of 450 × 400 μm2 in this developed device is composed of a sensing SnO2 film, which is fabricated by electron-gun evaporation with proper annealing in ambient oxygen gas to yield fine particles and good structure. An integrated solid-state heater with a 4.5 μm-thick cantilever bridge (1000 × 500 μm2) structure is made of silicon carbide (SiC) material by MEMS technologies. The sensitivity for 1000 ppm ethanol gas reaches as high as 90 with 10 s and 2 min for the response and recovery time, respectively, at an operating temperature of 300°C. Those experimental results also exhibit a much superior performance to that of a popular commercial ethanol gas sensor TGS-822. Therefore, the developed sensor with high performance is a good candidate for some specific application in automobile to detect drink-drive limit and allows an array integration available with various films for controlling each element at separate resistance.
AB - The paper reports the successful fabrication of ethanol gas sensors with tin-dioxide (SnO2) thin films integrated with a solid-state heater, which is realized with technologies of micro-electro-mechanical systems (MEMS), and are compatible with VLSI processes. The main sensing part with dimensions of 450 × 400 μm2 in this developed device is composed of a sensing SnO2 film, which is fabricated by electron-gun evaporation with proper annealing in ambient oxygen gas to yield fine particles and good structure. An integrated solid-state heater with a 4.5 μm-thick cantilever bridge (1000 × 500 μm2) structure is made of silicon carbide (SiC) material by MEMS technologies. The sensitivity for 1000 ppm ethanol gas reaches as high as 90 with 10 s and 2 min for the response and recovery time, respectively, at an operating temperature of 300°C. Those experimental results also exhibit a much superior performance to that of a popular commercial ethanol gas sensor TGS-822. Therefore, the developed sensor with high performance is a good candidate for some specific application in automobile to detect drink-drive limit and allows an array integration available with various films for controlling each element at separate resistance.
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U2 - 10.1016/s0925-4005(98)00240-8
DO - 10.1016/s0925-4005(98)00240-8
M3 - Article
AN - SCOPUS:0032131466
VL - B50
SP - 227
EP - 233
JO - Sensors and Actuators, B: Chemical
JF - Sensors and Actuators, B: Chemical
SN - 0925-4005
IS - 3
ER -