Highly efficient Ge detector integrated with waveguide based on SOI technology

Y. S. Tang; H. C. Shi; J. Chan; J. L. Liu; D. Teng; K. L. Wang

doi:10.1117/12.426928

Highly efficient Ge detector integrated with waveguide based on SOI technology

Y. S. Tang, H. C. Shi, J. Chan, J. L. Liu, D. Teng, K. L. Wang

電機資訊學院

研究成果: Article › 同行評審

摘要

This paper reports the growth, fabrication and characterization of integrated Ge detectors with rib waveguides based on SOI technology. The MBE Ge diode structures were first grown on different graded buffers on SOI wafers. These structures were then fabricated into individual and integrated diodes with various kinds of rib waveguides. Analysis of the performance of the integrated detectors indicates that Ge detectors with quantum efficiency over 70% can be achieved at 1.55um. Major obstacle for practical applications of these Ge detectors will be discussed.

原文	English
頁（從 - 到）	114-117
頁數	4
期刊	Proceedings of SPIE - The International Society for Optical Engineering
卷	4293
DOIs	https://doi.org/10.1117/12.426928
出版狀態	Published - 2001

All Science Journal Classification (ASJC) codes

電子、光磁材料
凝聚態物理學
電腦科學應用
應用數學
電氣與電子工程

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10.1117/12.426928

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author = "Tang, {Y. S.} and Shi, {H. C.} and J. Chan and Liu, {J. L.} and D. Teng and Wang, {K. L.}",

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AU - Tang, Y. S.

AU - Shi, H. C.

AU - Chan, J.

AU - Liu, J. L.

AU - Teng, D.

AU - Wang, K. L.

PY - 2001

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AB - This paper reports the growth, fabrication and characterization of integrated Ge detectors with rib waveguides based on SOI technology. The MBE Ge diode structures were first grown on different graded buffers on SOI wafers. These structures were then fabricated into individual and integrated diodes with various kinds of rib waveguides. Analysis of the performance of the integrated detectors indicates that Ge detectors with quantum efficiency over 70% can be achieved at 1.55um. Major obstacle for practical applications of these Ge detectors will be discussed.

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JO - Proceedings of SPIE - The International Society for Optical Engineering

JF - Proceedings of SPIE - The International Society for Optical Engineering

ER -

Highly efficient Ge detector integrated with waveguide based on SOI technology

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