Impact of oxygen annealing on high-k gate stack defects characterized by random telegraph noise
- Hsu Feng Chiu
- , San Lein Wu
- , Yee Shyi Chang
- , Shoou Jinn Chang
- , Jone Fang Chen
- , Shih Chang Tsai
- , Che Hua Hsu
- , Chien Ming Lai
- , Chia Wei Hsu
- , Osbert Cheng
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斯高帕斯（Scopus）