Impact of Zirconia addition for ALD Hafina in HKMG Device Fabricated GF vs. GL

Chen Kuo Chiang, Cheng-Han Wu, Y. Huang, Jun Feng Lin, Chin-Lung Yang, J. Y. Wu, Shui-Jinn Wang

研究成果: Conference contribution

原文English
主出版物標題2011 International Conference on Solid State Device and materials (SSDM’11)
出版地Nagoya, Japan
出版狀態Published - 2011 九月 28

引用此

Chiang, C. K., Wu, C-H., Huang, Y., Lin, J. F., Yang, C-L., Wu, J. Y., & Wang, S-J. (2011). Impact of Zirconia addition for ALD Hafina in HKMG Device Fabricated GF vs. GL. 於 2011 International Conference on Solid State Device and materials (SSDM’11)