Impact of Zirconia addition for ALD Hafina in HKMG Device Fabricated GF vs. GL

Chen Kuo Chiang, Cheng-Han Wu, Y. Huang, Jun Feng Lin, Chin-Lung Yang, J. Y. Wu, Shui-Jinn Wang

研究成果: Conference contribution

主出版物標題2011 International Conference on Solid State Device and materials (SSDM’11)
出版地Nagoya, Japan
出版狀態Published - 2011 9月 28