Implementation considerations of various virtual metrology algorithms

Yu Chuan Su, Tung Ho Lin, Fan Tien Cheng, Wei Ming Wu

研究成果: Conference contribution

8 引文 斯高帕斯(Scopus)

摘要

In the semiconductor industry, run-to-run (R2R) control is an important technique to improve process capability and further enhance the production yield. As the dimension of electronic device shrinks increasingly, wafer-to-wafer (W2W) advanced process control (APC) becomes essential for critical stages. W2W APC needs to obtain the metrology value of each wafer; however, it will be highly time and cost consuming for obtaining actual metrology value of each wafer by physical measurement. Recently, an efficient and cost-effective approach denoted virtual metrology (VM) was proposed to substitute the actual metrology. To implement VM in W2W APC, both conjecture-accuracy and real-time requirements need to be considered. In this paper, various VM algorithms of back-propagation neural network (BPNN), simple recurrent neural network (SRNN) and multiple regression (MR) are evaluated to see whether they can meet the accuracy and real-time requirements of W2W APC or not. The fifth-generation TFT-LCD CVD process is used to test and verify the requirements. Test results show that both one-hidden-layered BPNN and SRNN VM algorithms can achieve acceptable conjecture accuracy and meet the real-time requirements of semiconductor and TFT-LCD W2W APC applications.

原文English
主出版物標題Proceedings of the 3rd IEEE International Conference on Automation Science and Engineering, IEEE CASE 2007
頁面276-281
頁數6
DOIs
出版狀態Published - 2007 12月 1
事件3rd IEEE International Conference on Automation Science and Engineering, IEEE CASE 2007 - Scottsdale, AZ, United States
持續時間: 2007 9月 222007 9月 25

出版系列

名字Proceedings of the 3rd IEEE International Conference on Automation Science and Engineering, IEEE CASE 2007

Other

Other3rd IEEE International Conference on Automation Science and Engineering, IEEE CASE 2007
國家/地區United States
城市Scottsdale, AZ
期間07-09-2207-09-25

All Science Journal Classification (ASJC) codes

  • 控制與系統工程
  • 電氣與電子工程

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