Improvement on the diffusion barrier performance of reactively sputtered Ru-N film by incorporation of Ta

Chun Wei Chen, Jen-Sue Chen, Jiann Shing Jeng

研究成果: Article同行評審

37 引文 斯高帕斯(Scopus)

指紋

深入研究「Improvement on the diffusion barrier performance of reactively sputtered Ru-N film by incorporation of Ta」主題。共同形成了獨特的指紋。

Engineering & Materials Science

Chemical Compounds