In-situ thermal stability analysis of amorphous carbon films with different sp3 content

Mehdi Rouhani, Franklin Chau-Nan Hong, Yeau Ren Jeng

研究成果: Article同行評審

48 引文 斯高帕斯(Scopus)


A synchronized system integrating Raman spectroscopy and depth-sensing techniques was applied to analyze the microstructure, mechanical properties and surface roughness of amorphous carbon (a-C) films in-situ. This integrated system equipped with a high-temperature chamber coupled with feedback control made it possible to study the temperature effects on the mechanical properties and the microstructure of the films. A series of a-C films with different sp3 content were deposited on Si substrates using a filtered cathodic arc vacuum (FCVA) deposition system. Our study confirms previous results that the thermal stability of the a-C films depends on their sp3 content. The results also show that the structural change is accompanied by a significant increase in the surface roughness. This synchronized characterization technique demonstrates that the film hardness decreases with temperature even before any chemical changes detected using Raman spectroscopy. Moreover, the surface of the films is more sensitive to the temperature compared to the bulk as evidenced by the surface roughness characterization, showing that the surface roughness starts to rise at temperatures lower than for the onset of structural transition in the bulk. Nanoscratch and nanowear tests further support the conclusion that the surface sensitivity to temperature is greater than for the bulk.

頁(從 - 到)401-409
出版狀態Published - 2018 4月

All Science Journal Classification (ASJC) codes

  • 一般化學
  • 一般材料科學


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