Inertance effects to diffuser micropumps flow rate spectrum

Ngoc Bich Le, Yi Chu Hsu, Mau Sheng Lin, Ling Sheng Jang

研究成果: Conference contribution

摘要

This study presents a diffuser micropump and characterizes its output flow rates, like the parabola shape on the frequency domain and the effecting factors. First, equivalent circuit using fluid-electric analogy was built up; then, the flow rate analysis results were compared to experiment results to verify the applicability of the circuit simulation. The operation frequency was 800 Hz for both cases and the maximum flow rates were 0,078 and 0,075 μ1/s for simulation and experiment result, respectively. The maximum flow rate difference was 3.7%. The circuit then was used to analyze the inertial effects of transferred fluid as well as system components to the output flow rates. This work also explains why the flow rate spectrum has the shape of parabola. The analysis results showed that without inertial effects, the micropump flow rates are linearly proportional to the operation frequency; otherwise it has parabola shape. The natural frequency of the actuatormembrane structure was recognized using finite element method to verify if this parameter affects the characteristics of the flow rates. The experiment and simulation results demonstrated 800 Hz and 91.4 kHz for the frequency of the maximum pumping flow rate and the first mode natural frequency of actuator-membrane structure, respectively. It indicates that the structure natural frequencies of the actuatormembrane structure do not play any role to operate the micropumps.

原文English
主出版物標題2008 Proceedings of the ASME Micro/Nanoscale Heat Transfer International Conference, MNHT 2008
頁面87-96
頁數10
DOIs
出版狀態Published - 2008 8月 20
事件1st ASME Micro/Nanoscale Heat Transfer International Conference, MNHT08 - Tainan, Taiwan
持續時間: 2008 1月 62008 1月 9

出版系列

名字2008 Proceedings of the ASME Micro/Nanoscale Heat Transfer International Conference, MNHT 2008
PART A

Other

Other1st ASME Micro/Nanoscale Heat Transfer International Conference, MNHT08
國家/地區Taiwan
城市Tainan
期間08-01-0608-01-09

All Science Journal Classification (ASJC) codes

  • 材料力學
  • 材料科學(全部)
  • 凝聚態物理學
  • 原子與分子物理與光學

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