Influence of annealing ambience on TiO2 film ultraviolet photodetector

研究成果: Article

2 引文 (Scopus)

摘要

This study focuses on TiO2 thin films grown on quartz substrates using radio frequency magnetron sputtering. These films were annealed under argon, air, oxygen, and nitrogen ambients via a fused-silica tube furnace, and were then used to fabricate metalsemiconductor- metal (MSM) ultraviolet (UV) photodetectors (PDs). Further, all fabricated detectors exhibited a low dark current. Finally, we observed that under an N2 ambient, we could acquire the best parameters for annealing TiO2 UV PDs, with a maximum responsivity of 1.73×10-2 A/W, while the UV-to-visible rejection ratio achieved five orders of magnitude with a 330-nm illumination at 10 V applied bias. We attributed the reduction in dark current to the filling of oxygen vacancies from N2; hence, the response was improved. We believe that this method can be used to develop a highly-applicable and low-cost device.

原文English
頁(從 - 到)Q3056-Q3060
期刊ECS Journal of Solid State Science and Technology
6
發行號2
DOIs
出版狀態Published - 2017 一月 1

指紋

Dark currents
Photodetectors
Annealing
Quartz
Argon
Oxygen vacancies
Fused silica
Magnetron sputtering
Furnaces
Nitrogen
Lighting
Metals
Oxygen
Detectors
Thin films
Substrates
Air
Costs

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials

引用此文

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title = "Influence of annealing ambience on TiO2 film ultraviolet photodetector",
abstract = "This study focuses on TiO2 thin films grown on quartz substrates using radio frequency magnetron sputtering. These films were annealed under argon, air, oxygen, and nitrogen ambients via a fused-silica tube furnace, and were then used to fabricate metalsemiconductor- metal (MSM) ultraviolet (UV) photodetectors (PDs). Further, all fabricated detectors exhibited a low dark current. Finally, we observed that under an N2 ambient, we could acquire the best parameters for annealing TiO2 UV PDs, with a maximum responsivity of 1.73×10-2 A/W, while the UV-to-visible rejection ratio achieved five orders of magnitude with a 330-nm illumination at 10 V applied bias. We attributed the reduction in dark current to the filling of oxygen vacancies from N2; hence, the response was improved. We believe that this method can be used to develop a highly-applicable and low-cost device.",
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AU - Li, Jyun Yi

AU - Chang, Sheng Po

AU - Hsu, Ming Hung

AU - Chang, Shoou Jinn

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Y1 - 2017/1/1

N2 - This study focuses on TiO2 thin films grown on quartz substrates using radio frequency magnetron sputtering. These films were annealed under argon, air, oxygen, and nitrogen ambients via a fused-silica tube furnace, and were then used to fabricate metalsemiconductor- metal (MSM) ultraviolet (UV) photodetectors (PDs). Further, all fabricated detectors exhibited a low dark current. Finally, we observed that under an N2 ambient, we could acquire the best parameters for annealing TiO2 UV PDs, with a maximum responsivity of 1.73×10-2 A/W, while the UV-to-visible rejection ratio achieved five orders of magnitude with a 330-nm illumination at 10 V applied bias. We attributed the reduction in dark current to the filling of oxygen vacancies from N2; hence, the response was improved. We believe that this method can be used to develop a highly-applicable and low-cost device.

AB - This study focuses on TiO2 thin films grown on quartz substrates using radio frequency magnetron sputtering. These films were annealed under argon, air, oxygen, and nitrogen ambients via a fused-silica tube furnace, and were then used to fabricate metalsemiconductor- metal (MSM) ultraviolet (UV) photodetectors (PDs). Further, all fabricated detectors exhibited a low dark current. Finally, we observed that under an N2 ambient, we could acquire the best parameters for annealing TiO2 UV PDs, with a maximum responsivity of 1.73×10-2 A/W, while the UV-to-visible rejection ratio achieved five orders of magnitude with a 330-nm illumination at 10 V applied bias. We attributed the reduction in dark current to the filling of oxygen vacancies from N2; hence, the response was improved. We believe that this method can be used to develop a highly-applicable and low-cost device.

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