Influence of nitrogen doping on the barrier properties of sputtered tantalum carbide films for copper metallization

Shui-Jinn Wang, Hao Yi Tsai, Shi Chung Sun, Ming Hua Shiao

研究成果: Article同行評審

7 引文 斯高帕斯(Scopus)

指紋 深入研究「Influence of nitrogen doping on the barrier properties of sputtered tantalum carbide films for copper metallization」主題。共同形成了獨特的指紋。

Engineering & Materials Science

Physics & Astronomy