Influence of pulsed-DC power frequency on mechanical properties and high speed drilling application of a-C:H:Zr-x coatings

W. H. Kao, Y. L. Su, S. H. Yao, S. H. Liu

研究成果: Conference contribution

摘要

The a-C:H:Zr-x coatings are deposited on micro-drills using a closed field unbalanced magnetron (CFUBM) sputtering system with pulsed-DC power frequencies in the range 30 kHz to 110 kHz (the x in the term a-C:H:Zr-x is the frequency varied in the deposition process). The hardness of the various coatings is systematically explored. Additionally, the machining performance of the coated micro-drills is investigated by conducting high-speed through-hole drilling tests utilizing Printed Circuit Board (PCB) specimens. The experimental results reveal that the a-C:H:Zr-70 coating has the highest hardness (42 GPa), while the a-C:H:Zr-110 coating has the lowest hardness (26 GPa). In addition, it is shown that the a-C:H:Zr-70 coating increases the life of the micro-drill by a factor of three compared to that of an uncoated micro-drill.

原文English
主出版物標題Mechatronics and Materials Processing I
頁面861-867
頁數7
DOIs
出版狀態Published - 2011 九月 28
事件2011 International Conference on Mechatronics and Materials Processing, ICMMP 2011 - Guangzhou, China
持續時間: 2011 十一月 182011 十一月 20

出版系列

名字Advanced Materials Research
328-330
ISSN(列印)1022-6680

Other

Other2011 International Conference on Mechatronics and Materials Processing, ICMMP 2011
國家China
城市Guangzhou
期間11-11-1811-11-20

All Science Journal Classification (ASJC) codes

  • Engineering(all)

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