Influence of the preferred orientation and thickness of zirconium nitride films on the diffusion property in copper

Cheng Shi Chen, Chuan Pu Liu, Heng Ghieh Yang, Chi Y.A. Tsao

研究成果: Article同行評審

35 引文 斯高帕斯(Scopus)
原文English
頁(從 - 到)1075-1083
頁數9
期刊Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
22
發行號3
出版狀態Published - 2004 七月 1

All Science Journal Classification (ASJC) codes

  • Condensed Matter Physics
  • Electrical and Electronic Engineering

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