摘要
In this study, we investigated the electrical, optical and structural properties of aluminum-doped ZnO (AZO) thin films by RF magnetron sputtering under different working pressure of 5 - 40 mTorr. Optimization of the prepared thin films shows low resistivity of 6.11 × 10-4 ?-cm, mobility of 4.295 cm2/V-s and carrier concentration of 3.277 × 1020 cm-3 at working pressure of 5 mTorr. The maximum transmittance of 98.99 % for wavelengths above 600 nm and Haacke figure of merit (FOM) are 6.44 × 10-3 ?-1 with working pressure of 5 mTorr. These results indicate that AZO thin films are a promising high conductivity transparent electrode scheme for solar cells and various displays applications.
| 原文 | English |
|---|---|
| 主出版物標題 | Proceedings - 2014 International Symposium on Computer, Consumer and Control, IS3C 2014 |
| 發行者 | IEEE Computer Society |
| 頁面 | 569-572 |
| 頁數 | 4 |
| ISBN（列印） | 9781479952779 |
| DOIs | |
| 出版狀態 | Published - 2014 一月 1 |
| 事件 | 2nd International Symposium on Computer, Consumer and Control, IS3C 2014 - Taichung, Taiwan 持續時間: 2014 六月 10 → 2014 六月 12 |
出版系列
| 名字 | Proceedings - 2014 International Symposium on Computer, Consumer and Control, IS3C 2014 |
|---|
Other
| Other | 2nd International Symposium on Computer, Consumer and Control, IS3C 2014 |
|---|---|
| 國家 | Taiwan |
| 城市 | Taichung |
| 期間 | 14-06-10 → 14-06-12 |
指紋
All Science Journal Classification (ASJC) codes
- Computer Science Applications
- Control and Systems Engineering
引用此文
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Influence of working pressure on structural and optoelectronic properties of Al-doped ZnO thin films. / Chu, Chien Hsun; Wu, Hung Wei; Huang, Jow Lay.
Proceedings - 2014 International Symposium on Computer, Consumer and Control, IS3C 2014. IEEE Computer Society, 2014. p. 569-572 6845947 (Proceedings - 2014 International Symposium on Computer, Consumer and Control, IS3C 2014).研究成果: Conference contribution
TY - GEN
T1 - Influence of working pressure on structural and optoelectronic properties of Al-doped ZnO thin films
AU - Chu, Chien Hsun
AU - Wu, Hung Wei
AU - Huang, Jow Lay
PY - 2014/1/1
Y1 - 2014/1/1
N2 - In this study, we investigated the electrical, optical and structural properties of aluminum-doped ZnO (AZO) thin films by RF magnetron sputtering under different working pressure of 5 - 40 mTorr. Optimization of the prepared thin films shows low resistivity of 6.11 × 10-4 ?-cm, mobility of 4.295 cm2/V-s and carrier concentration of 3.277 × 1020 cm-3 at working pressure of 5 mTorr. The maximum transmittance of 98.99 % for wavelengths above 600 nm and Haacke figure of merit (FOM) are 6.44 × 10-3 ?-1 with working pressure of 5 mTorr. These results indicate that AZO thin films are a promising high conductivity transparent electrode scheme for solar cells and various displays applications.
AB - In this study, we investigated the electrical, optical and structural properties of aluminum-doped ZnO (AZO) thin films by RF magnetron sputtering under different working pressure of 5 - 40 mTorr. Optimization of the prepared thin films shows low resistivity of 6.11 × 10-4 ?-cm, mobility of 4.295 cm2/V-s and carrier concentration of 3.277 × 1020 cm-3 at working pressure of 5 mTorr. The maximum transmittance of 98.99 % for wavelengths above 600 nm and Haacke figure of merit (FOM) are 6.44 × 10-3 ?-1 with working pressure of 5 mTorr. These results indicate that AZO thin films are a promising high conductivity transparent electrode scheme for solar cells and various displays applications.
UR - http://www.scopus.com/inward/record.url?scp=84904438352&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84904438352&partnerID=8YFLogxK
U2 - 10.1109/IS3C.2014.155
DO - 10.1109/IS3C.2014.155
M3 - Conference contribution
AN - SCOPUS:84904438352
SN - 9781479952779
T3 - Proceedings - 2014 International Symposium on Computer, Consumer and Control, IS3C 2014
SP - 569
EP - 572
BT - Proceedings - 2014 International Symposium on Computer, Consumer and Control, IS3C 2014
PB - IEEE Computer Society
ER -