Influence of zr doping on the tribological properties of amorphous carbon-nitride coating

Yan Liang Su, Sun Hui Yao, Yu Chen Lai, Huang Ming Wu

研究成果: Conference contribution

摘要

This study aimed to understand the influence of small amount of Zr doping of amorphous carbonitride (a-CN) coatings on the structure, and mechanical and tribological behavior. The coatings were prepared using a four-target close-field unbalance magnetron sputtering system; two graphite, one Ti and one Zr targets were used. GDOS, SEM, XRD and XPS were used. A surface profilometer, a nano-hardness tester, and a pin-on-disk wear tester were used. It was found the Zr doping resulting in the formation of ZrC and ZrN phases within the coating and the increase in the sp3 bonding fraction. The nano-hardness was increased and the wear performance was largely improved.

原文English
主出版物標題Engineering Tribology and Materials III
編輯Yunn Lin Hwang
發行者Trans Tech Publications Ltd
頁面9-14
頁數6
ISBN(列印)9783035714623
DOIs
出版狀態Published - 2019
事件4th International Conference on Engineering Tribology and Applied Technology, ICETAT 2018 - Taipei, Taiwan
持續時間: 2018 11月 162018 11月 18

出版系列

名字Key Engineering Materials
823 KEM
ISSN(列印)1013-9826
ISSN(電子)1662-9795

Conference

Conference4th International Conference on Engineering Tribology and Applied Technology, ICETAT 2018
國家/地區Taiwan
城市Taipei
期間18-11-1618-11-18

All Science Journal Classification (ASJC) codes

  • 一般材料科學
  • 材料力學
  • 機械工業

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