Influences of reflector gratings on the properties of love wave acoustic sensors in ZnO/quartz structure

C. H.U. Sheng-Yuan; Walter Water

doi:10.1080/10584580390230002

Influences of reflector gratings on the properties of love wave acoustic sensors in ZnO/quartz structure

C. H.U. Sheng-Yuan, Walter Water

電機工程學系

研究成果: Article › 同行評審

1 引文斯高帕斯（Scopus）

摘要

Love wave acoustic devices are very promising in biosensors applications in liquid environments because of their high sensitivity. ZnO films with c-axis orientated crystalline structure have been grown successfully on 90°-rotated ST-cut quartz by r.f. sputtering technique. In this paper, a Love mode sensor with two-port interdigital transducer and reflector grating structure is reported. Frequency response with narrower bandwidth and higher sensitivity has been achieved.

原文	English
頁（從 - 到）	121-125
頁數	5
期刊	Integrated Ferroelectrics
卷	51
DOIs	https://doi.org/10.1080/10584580390230002
出版狀態	Published - 2003

All Science Journal Classification (ASJC) codes

電子、光磁材料
控制與系統工程
陶瓷和複合材料
凝聚態物理學
電氣與電子工程
材料化學

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10.1080/10584580390230002

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abstract = "Love wave acoustic devices are very promising in biosensors applications in liquid environments because of their high sensitivity. ZnO films with c-axis orientated crystalline structure have been grown successfully on 90°-rotated ST-cut quartz by r.f. sputtering technique. In this paper, a Love mode sensor with two-port interdigital transducer and reflector grating structure is reported. Frequency response with narrower bandwidth and higher sensitivity has been achieved.",

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Influences of reflector gratings on the properties of love wave acoustic sensors in ZnO/quartz structure

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