Infrared heating and roller-based contact printing technology for the fabrication of micro/nano-structures

Yung Chun Lee, Hsueh Liang Chen, Chun Hung Chen, Hung Yi Lin

研究成果: Conference contribution

摘要

This paper presents a new roller-based nanoimprinting method based on the Infrared assisted metal transfer technique. It utilizes a silicon mold which is deposited with a thin metal film for pattern transferring. Another metal film which acts as an adhesion layer is also deposited on the substrate surface. An infrared light source incident from the substrate side heats up the metal films. After imprinting, the patterned metal film defined by sub-micro-and nano-scale features of the mold can be transferred from the mold to the substrate. A glass roller is introduced in this new method. Optically, the glass roller is acting like a cylindrical lens which can focus the infrared light into a line source at the mold/substrate interface. Mechanically, the roller provides a constant line-type contact pressure between the mold and substrate. In this paper, quartz substrates have been successfully patterned and, after appropriated etching processes, quartz molds are obtained.

原文English
主出版物標題4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2009
頁面779-782
頁數4
DOIs
出版狀態Published - 2009
事件4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2009 - Shenzhen, China
持續時間: 2009 1月 52009 1月 8

出版系列

名字4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2009

Other

Other4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2009
國家/地區China
城市Shenzhen
期間09-01-0509-01-08

All Science Journal Classification (ASJC) codes

  • 電氣與電子工程

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