InGaAsP thin-film microdisk resonators fabricated by polymer wafer bonding for wavelength add-drop filters

Yong Ma, Gilbert Chang, Seoijin Park, Liwei Wang, Seng Tiong Ho

研究成果: Article同行評審

29 引文 斯高帕斯(Scopus)

摘要

10-μm-diameter InGaAsP thin-film microdisk resonators have been fabricated using polymer-wafer bonding with benzocyclobutene. This wafer bonding process is to provide strong two-dimensional mode confinement in the waveguide and reduce the optical propagation loss. The measured resonance linewidth at wavelength 1.55 μm is about 0.22 nm with a free-spectral range of 20 nm. The narrow linewidth and large free-spectral range make these devices conducive to the applications in dense wavelength division multiplexed systems.

原文English
頁(從 - 到)1495-1497
頁數3
期刊IEEE Photonics Technology Letters
12
發行號11
DOIs
出版狀態Published - 2000 十一月

All Science Journal Classification (ASJC) codes

  • 電子、光磁材料
  • 原子與分子物理與光學
  • 電氣與電子工程

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