Inhibiting the detrimental Cu protrusion in Cu through-silicon-via by highly (111)-oriented nanotwinned Cu

Ting Chun Lin, Chien Lung Liang, Shan Bo Wang, Yung Sheng Lin, Chin Li Kao, David Tarng, Kwang Lung Lin

研究成果: Article › 同行評審

9 引文 斯高帕斯（Scopus）

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Engineering & Materials Science

Physics & Astronomy

Chemical Compounds