Mg-doped p-GaN epitaxial layers prepared at different temperatures were prepared and characterized. It was found that we could achieve a higher hole concentration and a rough surface by reducing the growth temperature down to 800 °C. In0.23Ga0.77N/GaN multiquantum well (MQW) light emitting diodes (LEDs) with such a low 800 °C-grown p-GaN cap layer were also fabricated. It was found that we could enhance the LED output intensity by more than 90% with the low 800 °C-grown p-GaN cap layer, as compared to the conventional high 1000 °C-grown p-GaN cap layer.
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