Integrated facility layout and material handling system design in semiconductor fabrication facilities

Brett A. Peters, Taho Yang

研究成果: Article同行評審

91 引文 斯高帕斯(Scopus)

指紋 深入研究「Integrated facility layout and material handling system design in semiconductor fabrication facilities」主題。共同形成了獨特的指紋。

Physics & Astronomy

Chemical Compounds

Engineering & Materials Science