Interfacial Microstructure Evolution of (B, Al)N Films Grown on Diamond Substrates

Jen Hao Song, Jow Lay Huang, James C. Sung, Sheng Chang Wang, Horng Hwa Lu, Ding Fwu Lii

研究成果: Article

5 引文 斯高帕斯(Scopus)

摘要

This study reports on the deposition of c-axis oriented boron-aluminum nitride ((B, Al)N) layers on polycrystalline and single crystal (111) diamond substrates using a magnetron co-sputtering system. In this study, the lattice mismatch between (B, Al)N and diamond appears to be an important factor in the mechanism behind the growth of (B, Al)N on diamond. Diamond has a significantly tighter lattice than (B, Al)N, and the single (111) diamond substrate has the same lattice symmetry as that of aluminum nitride (AlN) (0002). X-ray diffractometry and transmission electron microscopy were employed to analyze the microstructure of (B, Al)N films on both substrates, and the results showed a continuous variation in structure, from randomly oriented nano-grains to c-axis oriented columns. In addition, the (B, Al)N film exhibited a thinner, randomly oriented nano-grain layer on single crystal (111) diamond than on polycrystalline diamond.

原文English
頁(從 - 到)4212-4215
頁數4
期刊Thin Solid Films
519
發行號13
DOIs
出版狀態Published - 2011 四月 29

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Materials Chemistry

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