Inverse-feedforward and robust-feedback control for high-speed operation on piezo-stages

Po Jen Ko, Yen Po Wang, Szu-Chi Tien

研究成果: Article

8 引文 (Scopus)

摘要

This article demonstrates an approach to compensate for tracking errors resulting from hysteresis and vibration when operating piezo-stages and to achieve precision motion control on them. In order to achieve this goal, inverse-feedforward control and H -feedback control were utilised to augment each other. Experimental results showed that pure feedforward control would suffer from modelling uncertainty and pure feedback control would be limited on its bandwidth; therefore, both of these could compensate for partial tracking errors. In contrast, the proposed approach integrated the merits of feedforward and feedback controls to improve the tracking performance when operating piezo-stages in long-stroke and high-speed.

原文English
頁(從 - 到)197-209
頁數13
期刊International Journal of Control
86
發行號2
DOIs
出版狀態Published - 2013 二月 1

指紋

Feedforward control
Robust control
Feedback control
Motion control
Hysteresis
Bandwidth

All Science Journal Classification (ASJC) codes

  • Control and Systems Engineering
  • Computer Science Applications

引用此文

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Inverse-feedforward and robust-feedback control for high-speed operation on piezo-stages. / Ko, Po Jen; Wang, Yen Po; Tien, Szu-Chi.

於: International Journal of Control, 卷 86, 編號 2, 01.02.2013, p. 197-209.

研究成果: Article

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AB - This article demonstrates an approach to compensate for tracking errors resulting from hysteresis and vibration when operating piezo-stages and to achieve precision motion control on them. In order to achieve this goal, inverse-feedforward control and H ∞-feedback control were utilised to augment each other. Experimental results showed that pure feedforward control would suffer from modelling uncertainty and pure feedback control would be limited on its bandwidth; therefore, both of these could compensate for partial tracking errors. In contrast, the proposed approach integrated the merits of feedforward and feedback controls to improve the tracking performance when operating piezo-stages in long-stroke and high-speed.

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