Investigation of Achieving Ultrasonic Haptic Feedback Using Piezoelectric Micromachined Ultrasonic Transducer

Ultrasound haptics is a contactless tactile feedback method that creates a tactile sensation by focusing high-intensity ultrasound on human skin. Although air-coupled ultrasound transducers have been applied to commercial products, the existing models are too bulky to be integrated into consumer electronics. Therefore, this study proposes a piezoelectric micromachined ultrasonic transducer (pMUT) with a small size and low power consumption to replace traditional transducers. The proposed pMUT has a resonance frequency of 40 kHz and a radius designed through the circular plate model and finite element model. To achieve better performance, lead zirconate titanate was selected as the piezoelectric layer and fabricated via RF sputtering. The cavity of the pMUT was formed by releasing a circular membrane with deep reactive ion etching. The resonance frequency of the pMUT was 32.9 kHz, which was close to the simulation result. The acoustic pressure of a single pMUT was 0.227 Pa at 70 Vpp. This study has successfully demonstrated a pMUT platform, including the optimized design procedures, characterization techniques, and fabrication process, as well as showing the potential of pMUT arrays for ultrasound haptics applications.