Investigation of degradation for ohmic performance of oxidized Au/Ni/Mg-doped GaN

Yow Jon Lin; Zhen Dao Li; Chou Wei Hsu; Feng Tso Chien; Ching Ting Lee; Sheng Tien Shao; Hsing Cheng Chang

doi:10.1063/1.1569991

Investigation of degradation for ohmic performance of oxidized Au/Ni/Mg-doped GaN

Yow Jon Lin, Zhen Dao Li, Chou Wei Hsu, Feng Tso Chien, Ching Ting Lee, Sheng Tien Shao, Hsing Cheng Chang

光電科學與工程學系

研究成果: Article › 同行評審

16 引文斯高帕斯（Scopus）

摘要

The degradation of ohmic performance of oxidized Au/Ni/Mg-doped GaN was investigated. Cserveny's concept was applied in the investigation and x-ray photoelectron spectroscopy was performed. It was found that an increase of hole concentration of NiO_x would lead to the increasing barrier height and the increasing specific contact resistance of oxidized Au/Ni/Mg-doped GaN.

原文	English
頁（從 - 到）	2817-2819
頁數	3
期刊	Applied Physics Letters
卷	82
發行號	17
DOIs	https://doi.org/10.1063/1.1569991
出版狀態	Published - 2003 四月 28

All Science Journal Classification (ASJC) codes

Physics and Astronomy (miscellaneous)

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10.1063/1.1569991

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AU - Chang, Hsing Cheng

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