Investigation of Mo Doping Effects on the Properties of AlN-Based Piezoelectric Films Using a Sputtering Technique

Guang Huan Feng, Cheng Ying Li, Yueh Han Chen, Yi Chen Ho, Sheng Yuan Chu, Cheng Che Tsai, Cheng Shong Hong

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5 引文 斯高帕斯（Scopus）

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Engineering & Materials Science

Chemical Compounds