Investigation of Nano-Mechanical and- Tribological Properties of Hydrogenated Diamond Like Carbon (DLC) Coatings

Y. R. Jeng, S. Islam, K. T. Wu, A. Erdemir, O. Eryilmaz

研究成果: Article同行評審

20 引文 斯高帕斯(Scopus)


Hydrogenated diamond like Carbon (H-DLC) is a promising lubricious coating that attracted a great deal of interest in recent years mainly because of its outstanding tribological properties. In this study, the nano-mechanical and -tribological properties of a range of H-DLC films were investigated. Specifically, four kinds of H-DLC coatings were produced on Si substrates in pure acetylene, pure methane, 25% methane + 75% hydrogen, 50% methane + 50% hydrogen discharge plasmas using a plasma enhanced chemical vapour deposition (PECVD) system. Nano indentation was performed to measure the mechanical properties such as hardness and young's modulus and nanoscartching was performed to investigate the frictional behavior and wear mechanism of the H-DLC samples in open air. Moreover, Vickers indentation method was utilized to assess the fracture toughness of the samples. The results revealed that there is a strong correlation between the mechanical properties (hardness, young's modulus, fracture toughness) and the friction coefficient of DLC coatings and the source gas chemistry. Lower hydrogen to carbon ratio in source gas leads to higher hardness, young's modulus, fracture toughness and lower friction coefficient. Furthermore, lower wear volume of the coated materials was observed when the friction coefficient was lower. It was also confirmed that lower hydrogen content of the DLC coating leads to higher wear resistance under nanoscratch conditions.

頁(從 - 到)769-776
期刊Journal of Mechanics
出版狀態Published - 2017 12月 1

All Science Journal Classification (ASJC) codes

  • 凝聚態物理學
  • 機械工業
  • 應用數學


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