TY - JOUR
T1 - Investigation of nanocrystal-(Ti,Al)Nx/ amorphous-SiNy composite films by co-deposition process
AU - Yau, Bao Shun
AU - Huang, Jow Lay
AU - Lii, Ding Fwu
AU - Sajgalik, Pavol
N1 - Funding Information:
The authors would like to thank the National Science Council of the ROC for its financial support under the contract no. NSC 91-2216-E006-057.
PY - 2004/1/30
Y1 - 2004/1/30
N2 - Nanocrystal-(Ti,Al)Nx/amorphous-SiNy composite films were prepared by the co-deposition process. The effects of deposition parameters on the composition, microstructure and mechanical properties of nanocomposite films were investigated. Results indicated that the composition of composite films could be possibly controlled through the co-deposition process. Nanocrystal-(Ti,Al)Nx embedded in amorphous-SiNy matrix with (2 0 0) preferred orientation was observed. The content of amorphous-SiNy has substantial influence on the residual stress, columnar structure, nanocrystallite size and hardness.
AB - Nanocrystal-(Ti,Al)Nx/amorphous-SiNy composite films were prepared by the co-deposition process. The effects of deposition parameters on the composition, microstructure and mechanical properties of nanocomposite films were investigated. Results indicated that the composition of composite films could be possibly controlled through the co-deposition process. Nanocrystal-(Ti,Al)Nx embedded in amorphous-SiNy matrix with (2 0 0) preferred orientation was observed. The content of amorphous-SiNy has substantial influence on the residual stress, columnar structure, nanocrystallite size and hardness.
UR - https://www.scopus.com/pages/publications/1342331945
UR - https://www.scopus.com/pages/publications/1342331945#tab=citedBy
U2 - 10.1016/j.surfcoat.2003.09.034
DO - 10.1016/j.surfcoat.2003.09.034
M3 - Article
AN - SCOPUS:1342331945
SN - 0257-8972
VL - 177-178
SP - 209
EP - 214
JO - Surface and Coatings Technology
JF - Surface and Coatings Technology
ER -