Investigation of the optical and the electrical characteristics of thin titanium dioxide films

S. L. Tu, Y. H. Su, Y. H. Shen, D. T. Ray, Y. C. Wu, T. H. Chen

研究成果: Article同行評審

摘要

This study dealt with the deposition of nanotitanium films with different thicknesses by using the ultrahigh vacuum ion beam sputtering system. It is found that the thickness of the titanium films was in the nanoscale thus the electric resistivity of the titanium films decreased. Moreover, the deposited titanium was transformed into titanium oxide in an oxygen atmosphere and by using a rapid annealing process. The photoelectronic properties of the nanotitanium thin film was enhanced, when the nanotitanium film was transformed to titanium dioxide.

原文English
頁(從 - 到)S26-S30
期刊Materials Research Innovations
18
發行號SUPPL. 3
DOIs
出版狀態Published - 2014 五月

All Science Journal Classification (ASJC) codes

  • 材料科學(全部)
  • 凝聚態物理學
  • 材料力學
  • 機械工業

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